Magnetron sputtering

In magnetron sputtering, magnetic fields focus plasmas onto target material surfaces, ejecting material that moves through the plasma to coat substrates. Suitable for depositing most materials (with correct choice of sputtering power supply).

Magnetron sputtering is a core speciality of Moorfield, with most of our systems offering this technique.

Magnetron sputtering products

Edwards e306
Edwards e306
Moorfield have been working with the Edwards E306 system for more than 2 decades.
MiniLab 026
MiniLab 026
MiniLab 026 systems are compact floor standing vacuum evaporators with easy-access ‘clam-shell’ chambers. Suitable for metal, dielectric and organics deposition via evaporation and sputtering techniques.
MiniLab 060
The most popular platform in our MiniLab range, MiniLab 060 systems have front-loading box-type chambers ideal for multiple-source magnetron sputtering but also thermal and e-beam evaporation.
MiniLab 080
MiniLab 080
MiniLab 080 systems offer tall chambers ideally suited for thermal, LTE and e-beam evaporation techniques requiring longer working distances for optimum uniformity.
MiniLab 125
MiniLab 125
MiniLab 125 tools take the modular concept to the pilot-scale level. Large chambers allow for increased-size component sets for coating large areas, and a range of load-lock options enable high-throughput operation. At the same time, systems are fully cust
nanoEM
The nanoEM system is the first electron microscopy coating tool with a full, research-grade feature set.
nanoPVD-ST15A
nanoPVD-ST15A
Model ST15A offers the combination of evaporation and sputtering techniques within a single process chamber. Ultimate research flexibility within a benchtop, automated package.

Knowledge base articles about Magnetron sputtering

Knowledge base

Substrate adhesion of sputtered films
Substrate adhesion of sputtered films
An introductory explanation of substrate adhesion, and how this can be improved….

Knowledge base

Confocal magnetron sputtering
Confocal magnetron sputtering
Confocal magnetron sputtering is now routinely employed for the production of excellent uniformity, multi-layer films by magnetron sputtering. This application note describes the technology, and explains the principles behind it….

Knowledge base

nanoPVD-T15A chamber interior with two TE1 sources for metals evaporation
PVD techniques
Moorfield are experienced in all common PVD techniques and can supply systems with fully-integrated component sets. Standalone components also available….

Knowledge base

Magnetron sputtering
Magnetron sputtering
Magnetron sputtering is a versatile technique suited to a wide range of materials – and provides excellent coating-substrate adhesion….

Knowledge base

Physical Vapour Deposition
Low temperature evaporation

Knowledge base

Thermal evaporation
Thermal evaporation
Thermal evaporation is the most straightforward physical vapour deposition (PVD) technique, in terms of both mechanism and system configuration. The method is suitable for depositing a range of materials, primarily metals. …

Recent news about Magnetron sputtering

Sputter targets
New dedicated sputter targets site launched
Recirculating chillers
Using recirculating chillers
Don’t land yourself in cold water. Protect your investment with a chiller…
Moorfield Magnetron
Sputtering magnetrons & targets from Moorfield
As well as complete sputtering systems, Moorfield sell a range of deposition components and consumables including magnetron sources and targets….
nanoPVD-T15A
Moorfield’s nanoPVD range goes from strength to strength
Four recent installations in London, Sweden, and Norway…
Featured: Straight to the source
Moorfield stock a range of high-vacuum magnetron sputtering heads for industry-standard diameter targets….
On the road again
This June, Moorfield will be touring the Benelux territories with local representative ST Instruments. In the back of the van will be a working nanoPVD-S10A system!…
Transparent conductive oxide deposition: The solution is clear
Deposition of TCOs such as ITO, AZO and ZnO is common throughout photovoltaic and touchscreen R&D….
Featured story
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Fluorinated Gas Etching
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Moorfield Nanotechnology Limited. Unit 1 Wolfe Close, Parkgate Industrial Estate, Knutsford, Cheshire, United Kingdom. WA16 8XJ. ©2022 Moorfield Nanotechnology Limited.
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