The units include stainless-steel chambers, turbomolecular pumping systems, water-cooled circular magnetrons for continuous operation, and a precision sputtering power supply (DC; up to 300 W) as standard, all in a space-saving benchtop package.
Ease-of-use and coating speed are built in for routine preparation of TEM/SEM samples (e.g., with sputtering of gold and/or carbon), but with high-end components and compatibility with conventional targets, the possibilities are endless.
All nanoEM systems require chilled water, dry compressed air, nitrogen for venting (optional), process gas (Ar), and electrical power. Exact requirements will be provided with quotations or on request.
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