Moorfield Nanotechnology

UK Laboratory Equipment Specialists in PVD (Physical Vapour Deposition), CVD (Chemical Vapour Deposition) and Etch Systems

Our systems are used for academic and industrial research, including semiconductors, photovoltaics, graphene and 2D materials.

Moorfield’s world-class scientific laboratory equipment is built to match your research needs. We can also service and repair existing tools, and provide advice relating to a custom project.

Solutions

Thermal processing
Thermal processing
Complete thermal processing systems and bespoke components for high-temperature sample processing under controlled low-pressure, inert and reactive atmospheres.
Thermal Evaporation
Thermal evaporation
Thermal evaporation is a straightforward means of thin film deposition with materials being heated to evaporation temperatures via a resistively heated support.
Soft-Etching
Plasma etching
Plasma etching technology from Moorfield is used for for Soft Etching of sensitive materials, reactive ion etching (RIE) and for substrate cleaning. The technology is available packaged into dedicated nanoETCH tools or in combination with other hardware inside larger MiniLab process chambers and load-locks.
slide_nanopvd-s10a_1
Physical vapour deposition
PVD systems have been at the core of our business for two decades.
Nanoparticle Vacuum Deposition
Nanoparticle Vacuum Deposition
Nanoparticle vacuum deposition sources allow for the deposition, under high-vacuum conditions, of nanoparticles with sizes in the range of 1–20 nm. The sources can be fitted to MiniLab systems with process chambers customised for accepting the necessary hardware.
Magnetron Sputtering
Magnetron sputtering
In magnetron sputtering, magnetic fields focus plasmas onto target material surfaces, ejecting material that moves through the plasma to coat substrates. Suitable for depositing most materials (with correct choice of sputtering power supply).
Low temperature evaporation
Low temperature evaporation
In low temperature evaporation (LTE), resistive heating is used to evaporate materials held in a crucible.
Glovebox soft etching
Glovebox soft-etching
Moorfield introduce their glovebox-integrated MiniLab 026 “soft-etching” tools for researchers working on graphene and 2D materials that require sample handling in inert atmospheres.
Glovebox systems
Glovebox integrated systems
Glovebox-compatible MiniLab systems for physical vapour deposition (PVD), etching and annealing processes.
Thermal processing
Thermal processing
Complete thermal processing systems and bespoke components for high-temperature sample processing under controlled low-pressure, inert and reactive atmospheres.
Thermal Evaporation
Thermal evaporation
Thermal evaporation is a straightforward means of thin film deposition with materials being heated to evaporation temperatures via a resistively heated support.
Soft-Etching
Plasma etching
Plasma etching technology from Moorfield is used for for Soft Etching of sensitive materials, reactive ion etching (RIE) and for substrate cleaning. The technology is available packaged into dedicated nanoETCH tools or in combination with other hardware inside larger MiniLab process chambers and load-locks.
slide_nanopvd-s10a_1
Physical vapour deposition
PVD systems have been at the core of our business for two decades.

Our products

Filter by solution:

Edwards e306
Edwards e306
Moorfield have been working with the Edwards E306 system for more than 2 decades.
ANNEAL
ANNEAL
High-temperature vacuum annealing for planar substrates, up to 1000 °C, with precision gas and pressure control—all in a benchtop package.
nanoEM
The nanoEM system is the first electron microscopy coating tool with a full, research-grade feature set.
nanoCVD-WPG
nanoCVD-WG(P)
A compact, plasma-enhanced, wafer-scale CVD (Chemical Vapour Deposition) system for rapid synthesis of high-quality graphene.
nanoCVD-8N
nanoCVD-8N
A compact, turn-key and scalable CVD system for high-throughput carbon nanotube synthesis – with proven performance.
nanoCVD-8G
A benchtop graphene CVD system for rapid, on-demand synthesis of high-quality graphene. Fully automated cold-wall technology for reduced contamination and running costs, and enhanced conditions control.
nanoPVD-ST15A
nanoPVD-ST15A
Model ST15A offers the combination of evaporation and sputtering techniques within a single process chamber. Ultimate research flexibility within a benchtop, automated package.
nanoPVD-T15A
nanoPVD-T15A
High-performance metals, organic evaporation in compact packages for benchtop location. Superior, efficient performance and ideal for OLED, OPV and OFET research.
nanoPVD S10A
nanoPVD-S10A-WA
The nanoPVD-S10A-WA is a Wide-Area configuration that extends the capabilities of the nanoPVD-S10A to allow for even coating of substrate diameters up to 8″, in a benchtop package. RF and DC magnetron sputtering allow for deposition of both metals and insu
Edwards e306
Edwards e306
Moorfield have been working with the Edwards E306 system for more than 2 decades.
ANNEAL
ANNEAL
High-temperature vacuum annealing for planar substrates, up to 1000 °C, with precision gas and pressure control—all in a benchtop package.
nanoEM
The nanoEM system is the first electron microscopy coating tool with a full, research-grade feature set.
nanoCVD-WPG
nanoCVD-WG(P)
A compact, plasma-enhanced, wafer-scale CVD (Chemical Vapour Deposition) system for rapid synthesis of high-quality graphene.

What Moorfield delivers

Expert-level support
Worldwide distribution
Compact system footprint
Research-grade tools
Multiple techniques
Custom design
Cleanroom compatible
Powerful software

What Moorfield delivers

Expert-level support
Worldwide distribution
Compact system footprint
Research-grade tools
Multiple techniques
Custom design
Cleanroom compatible
Powerful software

Latest news & articles

Powder Aerosol Deposition Tools
University of Manchester take delivery of deposition tools…
Fluorinated Gas Etching
Moorfield have enhanced their Soft Etching technology to allow for the use of fluorinated etchant gases such as SF6 and CHF3, in addition to Ar, O2 and N2 (tools can be equipped for the supply of multiple gases)….
MiniLab 125 Nanoparticle Vacuum Deposition Tool
First Nanoparticle Vacuum Deposition Tool Shipped
At Moorfield, we are constantly developing the capabilities of our research tools. This month saw the first installation of a MiniLab tool equipped with a nanoparticle vacuum deposition source. …

Knowledge base

Nanoparticle Vacuum Deposition Sources
Nanoparticle Vacuum Deposition Sources
Moorfield MiniLab systems are now available with specialised sources for the vacuum deposition of ultra-pure vacuum deposited nanoparticles….

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