nanoPVD-T15A

High-performance metals, organic evaporation in compact packages for benchtop location. Superior, efficient performance and ideal for OLED, OPV and OFET research.
Techniques

Model T15A can be equipped with low-temperature evaporation (LTE) and standard resistive evaporation sources for deposition of organics and metals, respectively.

LTE sources are low thermal-mass for better control when evaporating volatile organic materials, while metals sources are our box-shielded TE1 models for efficient deposition and reduced cross-contamination.

Chamber access is via a hinged lid, that opens to reveal a stage suitable for holding substrates up to 4″ diameter. The chamber is tall, allowing for high-uniformity coating via evaporative techniques.

The units are easy to control via a touchscreen HMI interface, simple to maintain, have low running costs and come with a comprehensive range of safety features.

With a turbomolecular pumping system, high-vacuum base pressures, straightforward automated control via a touchscreen HMI and a range of options for flexible configuration, the nanoPVD-T15A is a versatile, efficient solution for world-class R&D applications.

Download the nanoPVD-T15A product brochure
Key features
  • Benchtop configuration
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  • Organics and metals evaporation sources
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  • High aspect-ratio chamber for uniform coating
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  • Fully automatic operation via touchscreen HMI
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  • Define/save multiple process recipes
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  • Up to 4” diameter substrates
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  • Base pressures <5 × 10-7 mbar
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  • Equipped for easy servicing
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  • Comprehensive safety features
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  • Proven performance
  • Options
  • Dry backing pump
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  • Fast chamber vent
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  • Automatic high-resolution pressure control
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  • Up to 4 LTE sources for organics
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  • Up to 2 evaporation sources for metals
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  • 500 °C substrate heating stage
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  • Substrate rotation, Z-shift and shutters
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  • Quartz crystal sensor head
  • Typical configurations

    Metals deposition
    Two thermal evaporation sources for metals evaporation with shutters and quartz crystal sensor head for rate/thickness calibration.

    Organics deposition
    Four LTE sources for organics deposition with shutters and quartz crystal sensor head for rate/thickness calibration.

    Metals and organics deposition
    Two thermal evaporation sources and two LTE sources for metals and organics PVD, with shutters and quartz crystal sensor head.

    Service requirements

    All nanoPVD-T15A systems require chilled water, dry compressed air, nitrogen for venting (optional) and electrical power. Exact requirements will be provided with quotations or on request.

    Get a quote for nanoPVD-T15A

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