Model T15A can be equipped with low-temperature evaporation (LTE) and standard resistive evaporation sources for deposition of organics and metals, respectively.
LTE sources are low thermal-mass for better control when evaporating volatile organic materials, while metals sources are our box-shielded TE1 models for efficient deposition and reduced cross-contamination.
Chamber access is via a hinged lid, that opens to reveal a stage suitable for holding substrates up to 4″ diameter. The chamber is tall, allowing for high-uniformity coating via evaporative techniques.
The units are easy to control via a touchscreen HMI interface, simple to maintain, have low running costs and come with a comprehensive range of safety features.
With a turbomolecular pumping system, high-vacuum base pressures, straightforward automated control via a touchscreen HMI and a range of options for flexible configuration, the nanoPVD-T15A is a versatile, efficient solution for world-class R&D applications.
Two thermal evaporation sources for metals evaporation with shutters and quartz crystal sensor head for rate/thickness calibration.
Four LTE sources for organics deposition with shutters and quartz crystal sensor head for rate/thickness calibration.
Metals and organics deposition
Two thermal evaporation sources and two LTE sources for metals and organics PVD, with shutters and quartz crystal sensor head.
All nanoPVD-T15A systems require chilled water, dry compressed air, nitrogen for venting (optional) and electrical power. Exact requirements will be provided with quotations or on request.
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