nanoPVD-ST15A

Model ST15A offers the combination of evaporation and sputtering techniques within a single process chamber. Ultimate research flexibility within a benchtop, automated package.
Techniques

High-performance evaporation and magnetron sputtering techniques within one process chamber — all housed in a compact, modular package for benchtop location. Ultimate flexibility for research-grade thin-film deposition requiring a space-friendly footprint.

The latest model in Moorfield’s nanoPVD range, model ST15A has been purpose-designed to accommodate both vacuum evaporation and magnetron sputtering sources within the a single process chamber. Available source types are low-temperature evaporation (LTE), standard resistive evaporation, and magnetron sputtering (2″ targets) for deposition of organics, dielectrics, and metals.

Each process chamber can hold up to 3 sources of up to 2 types. A full range of power supplies are available allowing for deposition of multiple film types — metals, insulators, dielectrics and organics — using the same system and even within the same process run.

As with all nanoPVD tools, chamber access is via a hinged lid, that opens to reveal a stage suitable for holding substrates up to 4″/100 mm diameter. The chamber is tall, allowing for high-uniformity coating via fitted techniques.

The units are easy to control via a touchscreen HMI interface, simple to maintain, have low running costs and come with a comprehensive range of safety features.

With a turbomolecular pumping system, high-vacuum base pressures, straightforward automated control via a touchscreen HMI and a range of options for flexible configuration, the nanoPVD-ST15A combines the proven ease-of-use and high-end performance the nanoPVD range has become known for with ultimate applications flexibility.

Key features
  • Benchtop configuration
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  • Magnetron sputtering, thermal evaporation, and low-temperature evaporation
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  • Deposition of metals, organics, and dielectrics
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  • Flexible source arrangement
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  • Up to 3 MFC-controlled process gases
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  • Automatic pressure control option
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  • Fully automatic operation via touchscreen HMI
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  • Up to 4” diameter substrates
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  • Sample heating option
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  • Base pressures <5 × 10-7 mbar
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  • Define/save multiple process recipes
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  • Equipped for easy servicing
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  • Comprehensive safety features
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  • Cleanroom compatible
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  • Proven performance
  • Options
  • Dry backing pump
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  • Fast chamber vent
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  • Chamber SafeSeal
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  • Substrate rotation
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  • Substrate Z-shift
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  • Source and/or substrate shutters
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  • 500 °C substrate heating
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  • Co-deposition
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  • SputterSwitch technology
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  • Up to 3 MFCs
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  • High-resolution automatic pressure control
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  • Quartz crystal sensor heads
  • Typical configurations

    Sputtering and metals evaporation
    1 magnetron with RF power supply (metals and/or dielectrics) and SputterSwitch module for shared output, 2 thermal evaporation sources (metals) with single power supply and switch for shared output.

    Automatic pressure control (Ar and O2 process gases), 500 °C substrate heating and quartz crystal sensor head for rate/thickness monitoring.

    Sputtering and organics evaporation
    2 magnetrons with DC power supply (metals) and SputterSwitch module for shared output, 1 low-temperature evaporation source (organics) with power supply.

    Ar process gas, Z-shift and bi-shutter for best 4″ substrate geometries, quartz crystal sensor head for rate/thickness monitoring.

    Service requirements

    All nanoPVD-S10A systems require chilled water, dry compressed air, nitrogen for venting (optional), process gas supplies, and electrical power. Exact requirements will be provided with quotations or on request.

    Get a quote for nanoPVD-ST15A

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