E-beam evaporation is a suitable technique for deposition of materials with the highest evaporation temperatures, including refractory metals and metal oxides. Moorfield’s MiniLab range is ideal for electron beam evaporation.
MiniLab 125 tools take the modular concept to the pilot-scale level. Large chambers allow for increased-size component sets for coating large areas, and a range of load-lock options enable high-throughput operation. At the same time, systems are fully customisable to match specific applications.