nanoPVD-T15A

High-performance metals, organic evaporation in compact packages for benchtop location. Superior, efficient performance and ideal for OLED, OPV and OFET research.

  • nanoPVD-T15A system for organics and metals evaporation
    nanoPVD-T15A system for organics and metals evaporation

The latest model in Moorfield’s nanoPVD range, model T15A can be equipped with low-temperature evaporation (LTE) and standard resistive evaporation sources for deposition of organics and metals, respectively.

LTE sources are low thermal-mass for better control when evaporating volatile organic materials, while metals sources are our box-shielded TE1 models for efficient deposition and reduced cross-contamination.

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Chamber access is via a hinged lid, that opens to reveal a stage suitable for holding substrates up to 4″ diameter. The chamber is tall, allowing for high-uniformity coating via evaporative techniques.

The units are easy to control via a touchscreen HMI interface, simple to maintain, have low running costs and come with a comprehensive range of safety features.

With a turbomolecular pumping system, high-vacuum base pressures, straightforward automated control via a touchscreen HMI and a range of options for flexible configuration, the nanoPVD-T15A is a versatile, efficient solution for world-class R&D applications.

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Key features:

  • Benchtop configuration
  • Organics and metals evaporation sources
  • High aspect-ratio chamber for uniform coating
  • Fully automatic operation via touchscreen HMI
  • Define/save multiple process recipes
  • Up to 4” diameter substrates
  • Base pressures <5 × 10-7 mbar
  • Equipped for easy servicing
  • Comprehensive safety features
  • Cleanroom compatible
  • Proven performance

Options:

Available options include:

  • Dry backing pump
  • Fast chamber vent
  • Automatic high-resolution pressure control
  • Up to 4 LTE sources for organics
  • Up to 2 evaporation sources for metals
  • 500 °C substrate heating stage
  • Substrate rotation, Z-shift and shutters
  • Quartz crystal sensor head

Configurations:

Examples of common nanoPVD-T15A configurations are:

  • Metals deposition: Two thermal evaporation sources for metals evaporation with shutters and quartz crystal sensor head for rate/thickness calibration.
  • Organics deposition: Four LTE sources for organics deposition with shutters and quartz crystal sensor head for rate/thickness calibration.
  • Metals and organics deposition: Two thermal evaporation sources and two LTE sources for metals and organics PVD, with shutters and quartz crystal sensor head.

Service Requirements:

All nanoPVD-T15A systems require chilled water, dry compressed air, nitrogen for venting (optional) and electrical power.

Exact requirements will be provided with quotations or on request.