The MiniLab range from Moorfield: Flexible, modular PVD systems for high-quality R&D and pilot-scale production.
MiniLab 026 systems are compact floor standing vacuum evaporators with easy-access ‘clam-shell’ chambers. Suitable for metal, dielectric and organics deposition via evaporation and sputtering techniques.
MiniLab 060 systems have cubic chambers ideal for magnetron sputtering (up to 4 × 3″ diameter sources), but that can also be fitted with evaporation components. The smallest MiniLab that can be fitetd with a load-lock