Where samples or deposition materials are air sensitive, a glovebox-integrated PVD tool is a must. Moorfield are experienced in the design and supply of such tools based on our MiniLab 026 and 090 platforms. System design includes a range of specialist features:
- Sliding front doors for in-glovebox operation
- Rear service doors
- Remote control interfaces
- Full protection of glovebox atmospheres
In addition to PVD techniques, glovebox tools can be fitted with a full range of annealing and etching hardware. Tools can be supplied alone or complete with supporting glovebox.