At Moorfield, we are constantly developing the capabilities of our research tools. This month saw the first installation of a MiniLab tool equipped with a nanoparticle vacuum deposition source.
At their heart, these sources consist of 1–3 magnetron sputtering sources. Material generated from these passes down an extended tube where it aggregates into nanoparticles of sizes 1–20 nm. At the end of the tube, the nanoparticles are ejected through an orifice into a process chamber where they coat a supported substrate. Applications of vacuum-deposited […]