Require oxidation of deposited films, in-situ between PVD-deposited layers? Moorfield have the answer! Our oxidation module fits to our MiniLab systems and allows for precise control of oxidation conditions for fabrication of advanced device structures. Contact us for details.
First Nanoparticle Vacuum Deposition Tool Shipped
21 April, 2022
At Moorfield, we are constantly developing the capabilities of our research tools. This month saw the first installation of a MiniLab tool equipped with a nanoparticle vacuum deposition source.
