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PVD, CVD and Etch Systems

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Thin Film Deposition Systems

We offer advanced benchtop and modular thin film deposition systems with magnetron sputtering and thermal evaporations options. In addition our benchtop range of CVD, anneal and Etch systems offer exceptional performance with a compact footprint.

Benchtop PVD Systems

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Modular PVD Systems

Graphene CVD Systems

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Etch Systems

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Anneal Systems

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