High-Capability Modular PVD System
MiniLab 125 High-Capability Modular PVD System
Larger modular PVD platform for complex multi-source, multi-technique and larger-substrate research programmes.
MiniLab 125 is Moorfield’s high-capability research platform for source capacity, larger substrates, advanced power options and future process flexibility.
Research-grade capability without enterprise complexity
This platform is positioned for research teams that need controllable thin-film process access, practical laboratory integration and clear configuration choices.
- Capability headroom for demanding R&D programmes
- Larger-substrate configuration for advanced thin-film work
- Multi-source and multi-technique configuration options
- HiPIMS, pulsed DC, e-beam and diagnostics by project
- Research-first alternative to production-scale complexity
Typical configurations
Use these examples as starting points. Moorfield can refine the final specification around your materials, substrates, gases, recipes and workflow constraints.
High-capability sputtering
For larger and more complex sputtered film programmes.
- Up to 5 source configuration
- Advanced power options
- Reactive process development
Multi-technique R&D
For labs that need sputtering, evaporation and e-beam pathways in one platform.
- Thermal and e-beam options
- QCM and diagnostics
- Flexible chamber architecture
Future-ready research platform
For programmes where capability requirements are expected to grow.
- Large-substrate configuration
- Integration and transfer options
- Long-term adaptability
Not sure which configuration is right for your research?
Discuss Your ApplicationKey features
Modular research architecture
Configure sources, chambers, stages and monitoring around the research programme.
Multi-technique capability
Combine sputtering, evaporation, e-beam and specialist process modules where required.
Advanced process control
Support for recipe-led workflows, monitoring, gas handling and advanced power options.
Scalable laboratory integration
Move beyond benchtop limits without defaulting to production-scale complexity.
Application-specific options
Load-lock, bias, heating and diagnostic options can be specified by project.
Long-term adaptability
The system can be configured and expanded as research priorities evolve.
Options and upgrades
Configure the platform around the process approach, substrate handling, automation and laboratory services your application needs. Options are confirmed with quotation for the final build.
Technical specifications
Exact specifications depend on final configuration and should be confirmed with quotation.
| System type | High-capability MiniLab modular PVD |
|---|---|
| Base pressure (HV) | 5×10-7 mbar |
| Max sputter sources | Up to 5 sources; 6 as special build |
| E-beam evaporation | Ferrotec 3-6 kW |
| Thermal / LTE evaporation | TE1 + LTE sources available |
| Other techniques | NPS, RGA, ion beam and beam-assisted deposition |
| HiPIMS / pulsed DC | Available; HiPSTER 1 + Pinnacle 1.5 kW power supply option |
| Maximum substrate size | 12″ (300 mm) |
| Substrate heating | Up to 800°C with SSIC heater |
| Substrate bias | RF + DC bias |
| Load lock | Optional Load Lock (up to 8″ substrates) |
| Glovebox compatible | Not listed in supplied comparison |
| Dual chamber | Available |
| Control software | PC + IntelliDep software |
| Rate / thickness monitoring | Up to 4 x water-cooled QCM + optional SQC-310 controller |
| Chamber material | Stainless steel; enables CF flanges |
| Warranty | 2 years |
Applications
Application-library examples where MiniLab 125 and related MiniLab configurations are cited in nanoparticle, photoreduction and device-structure research.
Insights into the Self-Inhibiting Photoreduction
Publication Title: Insights into the Self-Inhibiting Photoreduction of Cu 2 O in Bicarbonate Electrolytes
Lead facility: University of Antwerp
Moorfield product cited: MiniLab 125
Read applicationNanoparticle Vacuum Deposition Sources
Publication Title: Nanoparticle Vacuum Deposition Sources
Lead facility: Not stated in publication metadata
Moorfield product cited: MiniLab 125
Read applicationThin Film Bragg Reflector for Monolithic GaAs Devices
Publication Title: Thin Film Bragg Reflector for Monolithic GaAs Devices
Lead facility: Not stated in publication metadata
Moorfield product cited: MiniLab 125
Read applicationDirect Single-Molecule Detection in Super Resolution
Publication Title: Direct single-molecule detection and super-resolution imaging with a low-cost portable smartphone-based microscope
Lead facility: University of Fribourg
Moorfield product cited: MiniLab 080
Read applicationHexAuFoil for Ultra-High Resolution cryo-EM
Publication Title: Cryo-EM with sub–1 Å specimen movement
Lead facility: MRC Laboratory of Molecular Biology
Moorfield product cited: MiniLab 080
Read applicationBioz citation lookup
Publication Title: Bioz citation results for MiniLab 125
Lead facility: Multiple published sources where available in Bioz
Moorfield product cited: MiniLab 125
View Bioz citationsResources and next steps
Related systems
Build the right MiniLab 125 configuration for your research
Tell us about your materials, substrates, process gases and target films. Moorfield will help specify a practical system configuration.
MiniLab 125
Optimised for multi-technique applications, the MiniLab 125 is a modular magnetron sputtering and thermal evaporation PVD system for subrates up to 11″ diameter.
MiniLab 125 Modular PVD System
Optimised for multi-technique applications, a modular magnetron sputtering and thermal evaporation PVD system for substrates up to 11″ diameter.
Deposition sources are typically mounted on the chamber baseplate, but sputter-down configurations are also available.
Substrate stages, usually at the top of the chamber, can accommodate substrate sizes up to 11” diameter. Substrate heating, rotation, bias and Z-shift are available, together with planetary stages and source and substrate shutters. Configurations range from a manually operated thermal evaporation system up to a multi-technique tool with fully-automated process control.
Key features
- Modular design
- Turbomolecular or cryo-pumping systems
- Base pressures <5 × 10-7 mbar
- Metals, dielectrics and organics deposition
- Up to 11” diameter substrates
- Touchscreen HMI/PC for system control
- Equipped for easy servicing
- Comprehensive safety features and interlocks
- Cleanroom compatible
Example MiniLab Publications
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- Pumping: Turbomolecular or cryogenic high-vacuum pumps, rotary or scroll backing pumps
- Gas/pressure: Manual or automatic control via MFCs and throttle valves
- Load-locks: Single- and multiple-sample
- Stages: Rotation, heating, cooling, Z-shift, bias and planetary
- Shutters: Source and substrate, pneumatic or motorised
- Operation: Manual or automatic via front panels, touchscreen HMI or PC
- Process: Quartz crystal sensor heads for rate/thickness monitoring or feedback-loop control
Example Configurations
System Images
Protect your investment and maximise uptime
Your Moorfield system is a long-term asset that needs to operate reliably and repeatably. A Service Plan is designed to protect your investment by reducing unplanned downtime, improving system reliability, and giving your team faster access to expert support when you need it.
All plans include an annual preventive maintenance visit (with documented checks) plus remote technical support—helpful for troubleshooting issues quickly without waiting for an on-site visit. As your needs increase, higher tiers add greater consumables/parts cover, discounted call-outs and travel, priority scheduling, and training refresher days to help new users get up to speed and reduce avoidable errors.
Service Plans also support easier budgeting (fixed annual or monthly options on eligible tiers) and provide multi-system discounts.
Ask us which plan best fits your throughput demands and budget priorities using our CONTACT US FORM