nanoPVD-T15A
The nanoPVD-T15A is a benchtop evaporation system optimised for deposition of various high-melting point metals and volatile organics. As compact as an electron microscopy coater, but with high-end hardware for research-grade results.
nanoPVD-T15A Benchtop PVD System
Optimised for thermal evaporation onto substrates up to 4″ diameter. It can be equipped with standard resistive evaporation sources and/or low-temperature evaporation (LTE) sources for deposition of metals and organics, respectively.
LTE sources are low thermal-mass for better control when evaporating volatile organic materials, while metals sources are our box-shielded TE1 models for efficient deposition and reduced cross-contamination.
Chamber access is via a hinged lid that opens to reveal a stage suitable for holding substrates up to 4″ in diameter. The chamber is tall, allowing for high-uniformity coating via evaporative techniques.
The units are easy to control via a touchscreen HMI interface, simple to maintain, have low running costs and come with a comprehensive range of safety features.
With a turbomolecular pumping system, high-vacuum base pressures, straightforward automated control via a touchscreen HMI and a range of options for flexible configuration, the nanoPVD-T15A is a versatile, efficient solution for world-class R&D applications.
Key features
- Benchtop configuration
- Organics and metals evaporation sources
- High aspect-ratio chamber for uniform coating
- Fully automatic operation via touchscreen HMI
- Define/save multiple process recipes
- Up to 4” diameter substrates
- Base pressures <5 × 10-7 mbar
- Equipped for easy servicing
- Comprehensive safety features
- Proven performance
Example Publications
Powered by BiozOptions
- Dry backing pump
- Fast chamber vent
- Up to 4 LTE sources for organics
- Up to 2 evaporation sources for metals
- 500 °C substrate heating stage
- Substrate rotation, Z-shift and shutters
- Quartz crystal sensor head
Typical configurations
Metals deposition:
Two thermal evaporation sources for metals evaporation with shutters and quartz crystal sensor head for rate/thickness calibration.
Organics deposition:
Four LTE sources for organics deposition with shutters and quartz crystal sensor head for rate/thickness calibration.
Metals and organics deposition:
Two thermal evaporation sources and two LTE sources for metals and organics PVD, with shutters and quartz crystal sensor head.
Service requirements
All nanoPVD-T15A systems require chilled water, dry compressed air, nitrogen for venting (optional), and electrical power. Exact requirements will be provided with quotations or on request.
Protect your investment and maximise uptime
Your Moorfield system is a long-term asset that needs to operate reliably and repeatably. A Service Plan is designed to protect your investment by reducing unplanned downtime, improving system reliability, and giving your team faster access to expert support when you need it.
All plans include an annual preventive maintenance visit (with documented checks) plus remote technical support—helpful for troubleshooting issues quickly without waiting for an on-site visit. As your needs increase, higher tiers add greater consumables/parts cover, discounted call-outs and travel, priority scheduling, and training refresher days to help new users get up to speed and reduce avoidable errors.
Service Plans also support easier budgeting (fixed annual or monthly options on eligible tiers) and provide multi-system discounts.
Ask us which plan best fits your throughput demands and budget priorities using our CONTACT US FORM