Glovebox-Compatible Modular PVD System
MiniLab 090 Glovebox-Compatible PVD System
Modular PVD for air-sensitive device research, protected process transfer and advanced materials workflows.
MiniLab 090 is the strongest product story where glovebox integration, larger substrates and modular PVD process development need to work together.
Research-grade capability without enterprise complexity
This platform is positioned for research teams that need controllable thin-film process access, practical laboratory integration and clear configuration choices.
- Glovebox-compatible modular deposition approach
- Strong fit for oxygen and moisture-sensitive materials
- Supports sputtering and evaporation methods by configuration
- Larger MiniLab substrate positioning
- Application-led configuration for PV, OLED and quantum workflows
Typical configurations
Use these examples as starting points. Moorfield can refine the final specification around your materials, substrates, gases, recipes and workflow constraints.
Air-sensitive device stacks
For materials where exposure to oxygen or moisture changes the result.
- Glovebox-compatible setup
- Protected workflow integration
- PV, OLED and sensitive interfaces
Modular PVD in protected workflows
For projects needing flexible sources inside a controlled-atmosphere process chain.
- Sputtering and evaporation methods
- Process gas options
- Recipe-led operation
Sensitive material R&D
For research programmes where the process approach may change over time.
- MiniLab modularity
- Larger substrate positioning
- Long-term adaptability
Not sure which configuration is right for your research?
Discuss Your ApplicationKey features
Modular research architecture
Configure sources, chambers, stages and monitoring around the research programme.
Multi-technique capability
Combine sputtering, evaporation, e-beam and specialist process modules where required.
Advanced process control
Support for recipe-led workflows, monitoring, gas handling and advanced power options.
Scalable laboratory integration
Move beyond benchtop limits without defaulting to production-scale complexity.
Application-specific options
Glovebox, load-lock, bias, heating and diagnostic options can be specified by project.
Long-term adaptability
The system can be configured and expanded as research priorities evolve.
Options and upgrades
Configure the platform around the process approach, substrate handling, automation and laboratory services your application needs. Options are confirmed with quotation for the final build.
Technical specifications
Exact specifications depend on final configuration and should be confirmed with quotation.
| System type | Glovebox-compatible MiniLab modular PVD |
|---|---|
| Base pressure (HV) | 5×10-7 mbar |
| Sputtering | Available by configuration |
| E-beam evaporation | Not available in supplied comparison |
| Thermal / LTE evaporation | TE1 + LTE sources available |
| HiPIMS / pulsed DC | Available; HiPSTER 1 + Pinnacle 1.5 kW power supply option |
| Maximum substrate size | 8″ (200 mm) |
| Substrate heating | Up to 800°C with SSIC heater |
| Substrate bias | RF + DC bias |
| Load lock | Optional Load Lock (up to 8″ substrates) |
| Glovebox compatible | Yes; front + rear door configuration |
| Dual chamber | Available |
| Control software | PC + IntelliDep software |
| Rate / thickness monitoring | Up to 4 x water-cooled QCM + optional SQC-310 controller |
| Chamber material | Stainless steel; enables CF flanges |
| Warranty | 2 years |
Applications
Application-library examples where MiniLab 090 is cited in protected and organic optoelectronic thin-film research workflows.
Enhancing the Performance and Photostability
Publication Title: Enhancing the Performance and Photostability of Perovskite Solar Cells with a Multifunctional Light‐Management Composite
Lead facility: Aalto University
Moorfield product cited: MiniLab 090
Read applicationOrganic Light-Emitting Transistors (OLETs)
Publication Title: Hafnium Aluminate–Polymer Bilayer Dielectrics for Organic Light-Emitting Transistors (OLETs)
Lead facility: Aalto University
Moorfield product cited: MiniLab 090
Read applicationGreen Emissive Blends in OLETs
Publication Title: TCTA:Ir(ppy)3 Green Emissive Blends in Organic Light-Emitting Transistors (OLETs)
Lead facility: Aalto University
Moorfield product cited: MiniLab 090
Read applicationHigh-Efficiency Semitransparent Solar Cells
Publication Title: High‐Efficiency Semitransparent Solar Cells Based on Magnetron Sputtered Sb 2 S 3 Thin Films
Lead facility: Luleå University of Technology
Moorfield product cited: MiniLab 070
Read applicationTransmissive Hybrid Metal-Dielectric
Publication Title: Transmissive hybrid metal–dielectric metasurface bandpass filters for mid‐infrared applications
Lead facility: University of Cambridge
Moorfield product cited: MiniLab 070
Read applicationRewritable Resistive Memory Effect
Publication Title: Rewritable resistive memory effect in poly[ N -(3-(9 H -carbazol-9-yl)propyl)-methacrylamide] memristor
Lead facility: Charles University
Moorfield product cited: MiniLab 070
Read applicationBioz citation lookup
Publication Title: Bioz citation results for MiniLab 090
Lead facility: Multiple published sources where available in Bioz
Moorfield product cited: MiniLab 090
View Bioz citationsResources and next steps
Related systems
Build the right MiniLab 090 configuration for your research
Tell us about your materials, substrates, process gases and target films. Moorfield will help specify a practical system configuration.
MiniLab 090
MiniLab 090 systems are glovebox-compatible for atmosphere-sensitive applications for substates up to 11″ diameter. Tall chambers are ideal for high-performance evaporation, but magnetron sputtering is also available.
MiniLab 090 Modular PVD System
Glovebox-compatible for atmosphere-sensitive applications for substates up to 11″ diameter. Tall chambers are ideal for high-performance evaporation, but magnetron sputtering is also available.
MiniLab 090 systems are floor-standing PVD tools for metals, dielectrics and/or organics deposition. All systems contain a box-type stainless-steel chamber with front and rear doors for glovebox integration (allows for both through-glovebox and external service access).
The chamber has a high aspect-ratio, ideal for long working distances for high uniformity coating via evaporative techniques, but systems can also be equipped with magnetron sputtering. A turbomolecular pumping system is standard, for high-vacuum base pressures of better than 5 × 10-7 mbar. Exact configuration is extremely flexible and dependent on customer budgets and applications. Configurations range from a manually operated thermal evaporation system up to a multi-technique tool with fully-automated process control.
Key features
- Modular design
- Front sliding door for in-glovebox loading
- Rear door for service access
- Turbomolecular or cryo pumping systems
- Base pressures <5 × 10-7 mbar
- Metals, dielectrics and organics deposition
- Up to 11” diameter substrates
- Touchscreen HMI/PC for system control
- Equipped for easy servicing
- Comprehensive safety features and interlocks
- Cleanroom compatible
Example MiniLab Publications
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- Pumping: Turbomolecular or cryogenic high-vacuum pumps, rotary or scroll backing pumps
- Gas/pressure: Manual or automatic control via MFCs and throttle valves
- Load-locks: Single- and multiple-sample
- Stages: Rotation, heating, cooling, Z-shift, bias and planetary
- Shutters: Source and substrate, pneumatic or motorised
- Operation: Manual or automatic via front panels, touchscreen HMI or PC
- Process: Quartz crystal sensor heads for rate/thickness monitoring or feedback-loop control
Example Configurations
System Images
Protect your investment and maximise uptime
Your Moorfield system is a long-term asset that needs to operate reliably and repeatably. A Service Plan is designed to protect your investment by reducing unplanned downtime, improving system reliability, and giving your team faster access to expert support when you need it.
All plans include an annual preventive maintenance visit (with documented checks) plus remote technical support—helpful for troubleshooting issues quickly without waiting for an on-site visit. As your needs increase, higher tiers add greater consumables/parts cover, discounted call-outs and travel, priority scheduling, and training refresher days to help new users get up to speed and reduce avoidable errors.
Service Plans also support easier budgeting (fixed annual or monthly options on eligible tiers) and provide multi-system discounts.
Ask us which plan best fits your throughput demands and budget priorities using our CONTACT US FORM