MiniLab 026
MiniLab 026 systems are compact floor standing vacuum evaporators with easy-access ‘clam-shell’ chambers. Suitable for metal, dielectric and organics deposition via evaporation or sputtering techniques.
MiniLab 026 Modular PVD System
Compact, glovebox compatible and optimised for magnetron sputtering or thermal evaporation techniques for substrates up to 6″ diameter.
Techniques include thermal and low-temperature evaporation sources (for metals and organics), or magnetron sputtering sources (for metals and inorganics). Deposition sources are typically mounted on the chamber baseplate. Substrate stages are supported from the roof and can accommodate a range of substrate sizes up to 6” diameter. Substrate heating, rotation and Z-shift are available. The MiniLab 026 is also glovebox compatible and is the only system in the MiniLab range that can be easily retrofitted to an existing glovebox.
Key features
- Modular design
- ‘Clam-shell’ chamber
- Turbomolecular pumping system
- Base pressures <5 × 10-7 mbar
- Up to 6” diameter substrates
- Up to 3 sources
- Touchscreen HMI/PC for system control
- Equipped for easy servicing
- Comprehensive safety features and interlocks
- Cleanroom compatible
- Proven performance
- Glovebox-compatible
Example MiniLab Publications
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- Pumping: Rotary or scroll backing pumps.
- Gas/pressure: Manual or automatic control via MFCs and throttle valves.
- Stages: Rotation, heating, and Z-shift.
- Shutters: Source and substrate, pneumatic or motorised.
- Operation: Manual or automatic via front panels, touchscreen HMI or PC.
- Process: Quartz crystal sensor heads for rate/thickness monitoring or feedback-loop control.
Example configurations
