Compact Modular PVD System
MiniLab 026 Compact Modular PVD System
Compact modular deposition for glovebox-compatible and multi-technique research workflows.
MiniLab 026 bridges compact ownership and modular PVD capability for laboratories that need more flexibility than nanoPVD without over-specifying a larger system.
Research-grade capability without enterprise complexity
This platform is positioned for research teams that need controllable thin-film process access, practical laboratory integration and clear configuration choices.
- Compact modular PVD architecture for research labs
- Glovebox-compatible approach for air-sensitive workflows
- Sputtering and evaporation configuration options
- MiniLab control architecture for recipe-led R&D
- Expandable pathway beyond benchtop systems
Typical configurations
Use these examples as starting points. Moorfield can refine the final specification around your materials, substrates, gases, recipes and workflow constraints.
Glovebox compatible
For projects where air-sensitive materials need protected handling.
- MiniLab glovebox-compatible setup
- Air-sensitive material workflows
- Useful for PV, OLED and interface research
Compact modular PVD
For labs that need modularity but not the maximum MiniLab scale.
- Sputtering and evaporation methods
- Research-lab ownership
- Expandable configuration
Training and shared facilities
For repeatable local access across multiple research users.
- Recipe-led operation
- Practical serviceability
- Flexible process coverage
Not sure which configuration is right for your research?
Discuss Your ApplicationKey features
Modular research architecture
Configure sources, chambers, stages and monitoring around the research programme.
Multi-technique capability
Combine sputtering, evaporation, e-beam and specialist process modules where required.
Advanced process control
Support for recipe-led workflows, monitoring, gas handling and advanced power options.
Scalable laboratory integration
Move beyond benchtop limits without defaulting to production-scale complexity.
Application-specific options
Glovebox, load-lock, bias, heating and diagnostic options can be specified by project.
Long-term adaptability
The system can be configured and expanded as research priorities evolve.
Options and upgrades
Configure the platform around the process approach, substrate handling, automation and laboratory services your application needs. Options are confirmed with quotation for the final build.
Technical specifications
Exact specifications depend on final configuration and should be confirmed with quotation.
| System type | Compact MiniLab modular PVD |
|---|---|
| Base pressure (HV) | 5×10-7 mbar |
| Sputtering | Available by configuration |
| E-beam evaporation | Not available in supplied comparison |
| Thermal / LTE evaporation | TE1 + LTE sources available |
| HiPIMS / pulsed DC | Available; HiPSTER 1 + Pinnacle 1.5 kW power supply option |
| Maximum substrate size | 6" (150 mm) |
| Substrate heating | Up to 800°C with SSIC heater |
| Substrate bias | RF + DC bias |
| Load lock | Not available in supplied comparison |
| Glovebox compatible | Yes |
| Control software | PC + IntelliDep software |
| Rate / thickness monitoring | Up to 3 x water-cooled QCM + optional SQC-310 controller |
| Chamber material | Stainless steel; enables CF flanges |
| Warranty | 2 years |
Applications
Related MiniLab application-library examples for compact modular PVD workflows. Product cited is shown on each card for evidence clarity.
High-Efficiency Semitransparent Solar Cells
Publication Title: High‐Efficiency Semitransparent Solar Cells Based on Magnetron Sputtered Sb 2 S 3 Thin Films
Lead facility: Luleå University of Technology
Moorfield product cited: MiniLab 070
Read applicationTransmissive Hybrid Metal-Dielectric
Publication Title: Transmissive hybrid metal–dielectric metasurface bandpass filters for mid‐infrared applications
Lead facility: University of Cambridge
Moorfield product cited: MiniLab 070
Read applicationRewritable Resistive Memory Effect
Publication Title: Rewritable resistive memory effect in poly[ N -(3-(9 H -carbazol-9-yl)propyl)-methacrylamide] memristor
Lead facility: Charles University
Moorfield product cited: MiniLab 070
Read applicationSynapse-Mimicking Memristors Study
Publication Title: Synapse-Mimicking Memristors Based on 3,6-Di(tpy)-9-Phenylcarbazole Unimer and Its Copolymer with Cobalt(II) Ions
Lead facility: Charles University
Moorfield product cited: MiniLab 070
Read applicationPhotophysics: Insights in Ultrafast Processes
Publication Title: Photophysics of Benzoxazole and Dicyano Functionalised Diketopyrrolopyrrole Derivatives: Insights into Ultrafast Processes and the Triplet State
Lead facility: Charles University
Moorfield product cited: MiniLab 070
Read applicationSource selection for thermal evaporation
Publication Title: Source selection for thermal evaporation
Lead facility: Not stated in publication metadata
Moorfield product cited: MiniLab 070
Read applicationResources and next steps
Related systems
Build the right MiniLab 026 configuration for your research
Tell us about your materials, substrates, process gases and target films. Moorfield will help specify a practical system configuration.
MiniLab 026
MiniLab 026 systems are compact floor standing vacuum evaporators with easy-access ‘clam-shell’ chambers. Suitable for metal, dielectric and organics deposition via evaporation or sputtering techniques.
MiniLab 026 Modular PVD System
Compact, glovebox compatible and optimised for magnetron sputtering or thermal evaporation techniques for substrates up to 6″ diameter.
Techniques include thermal and low-temperature evaporation sources (for metals and organics), or magnetron sputtering sources (for metals and inorganics). Deposition sources are typically mounted on the chamber baseplate. Substrate stages are supported from the roof and can accommodate a range of substrate sizes up to 6” diameter. Substrate heating, rotation and Z-shift are available. The MiniLab 026 is also glovebox compatible and is the only system in the MiniLab range that can be easily retrofitted to an existing glovebox.
Key features
- Modular design
- ‘Clam-shell’ chamber
- Turbomolecular pumping system
- Base pressures <5 × 10-7 mbar
- Up to 6” diameter substrates
- Up to 3 sources
- Touchscreen HMI/PC for system control
- Equipped for easy servicing
- Comprehensive safety features and interlocks
- Cleanroom compatible
- Proven performance
- Glovebox-compatible
Example MiniLab Publications
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- Pumping: Rotary or scroll backing pumps.
- Gas/pressure: Manual or automatic control via MFCs and throttle valves.
- Stages: Rotation, heating, and Z-shift.
- Shutters: Source and substrate, pneumatic or motorised.
- Operation: Manual or automatic via front panels, touchscreen HMI or PC.
- Process: Quartz crystal sensor heads for rate/thickness monitoring or feedback-loop control.
Example configurations
System Images
Protect your investment and maximise uptime
Your Moorfield system is a long-term asset that needs to operate reliably and repeatably. A Service Plan is designed to protect your investment by reducing unplanned downtime, improving system reliability, and giving your team faster access to expert support when you need it.
All plans include an annual preventive maintenance visit (with documented checks) plus remote technical support—helpful for troubleshooting issues quickly without waiting for an on-site visit. As your needs increase, higher tiers add greater consumables/parts cover, discounted call-outs and travel, priority scheduling, and training refresher days to help new users get up to speed and reduce avoidable errors.
Service Plans also support easier budgeting (fixed annual or monthly options on eligible tiers) and provide multi-system discounts.
Ask us which plan best fits your throughput demands and budget priorities using our CONTACT US FORM