Advanced Modular Evaporation System
MiniLab 080 Modular Evaporation System
Advanced evaporation platform for thermal, organic and e-beam thin-film process development.
MiniLab 080 is strongest when evaporation flexibility is the deciding factor: thermal sources, organic/LTE methods, e-beam options and monitoring in one modular research platform.
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Research-grade capability without enterprise complexity
This platform is positioned for research teams that need controllable thin-film process access, practical laboratory integration and clear configuration choices.
- Evaporation-first modular platform for research workflows
- Thermal, organic/LTE and e-beam methods by configuration
- QCM monitoring options for rate and thickness control
- Stage heating, cooling and rotation options
- Useful for optics, organics, sensors and coatings research
Typical configurations
Use these examples as starting points. Moorfield can refine the final specification around your materials, substrates, gases, recipes and workflow constraints.
Thermal evaporation R&D
For metals, interfaces and optical coating development.
- Thermal source options
- QCM monitoring
- Repeatable recipe workflows
Organic and LTE workflows
For sensitive and volatile materials needing controlled source configurations.
- LTE/organic options
- Low-rate process development
- Device and interface research
E-beam evaporation
For materials requiring high-temperature evaporation capability.
- E-beam options
- Monitoring and control
- Advanced thin-film materials
Not sure which configuration is right for your research?
Discuss Your ApplicationKey features
Modular research architecture
Configure sources, chambers, stages and monitoring around the research programme.
Multi-technique capability
Combine sputtering, evaporation, e-beam and specialist process modules where required.
Advanced process control
Support for recipe-led workflows, monitoring, gas handling and advanced power options.
Scalable laboratory integration
Move beyond benchtop limits without defaulting to production-scale complexity.
Application-specific options
Glovebox, load-lock, bias, heating and diagnostic options can be specified by project.
Long-term adaptability
The system can be configured and expanded as research priorities evolve.
Options and upgrades
Configure the platform around the process approach, substrate handling, automation and laboratory services your application needs. Options are confirmed with quotation for the final build.
Technical specifications
Exact specifications depend on final configuration and should be confirmed with quotation.
| System type | MiniLab modular PVD |
|---|---|
| Base pressure (HV) | Confirm with Moorfield for this configuration |
| Sputtering | Available by configuration |
| E-beam evaporation | Telemark 246-6 |
| Thermal / LTE evaporation | TE1 + LTE sources available |
| HiPIMS / pulsed DC | Available; HiPSTER 1 + Pinnacle 1.5 kW power supply option |
| Maximum substrate size | 8" (200 mm) |
| Substrate heating | Up to 800°C with SSIC heater |
| Substrate bias | RF + DC bias |
| Load lock | Optional Load Lock (up to 8″ substrates) |
| Glovebox compatible | Not compatible |
| Dual chamber | Available |
| Control software | PC + IntelliDep software |
| Rate / thickness monitoring | Up to 4 x water-cooled QCM + optional SQC-310 controller |
| Chamber material | Stainless steel; enables CF flanges |
| Warranty | 2 years |
Applications
Application-library examples where MiniLab 080 is cited in published solar-cell, sensing, cryo-EM support-grid and nanoscale imaging workflows.
Cadmium and Zinc-Doped p-type Sb2Se3 Single Crystals
Publication Title: Cadmium and Zinc‐Doped p‐type Sb 2 Se 3 Single Crystals and Solar Cells
Lead facility: University of Liverpool
Moorfield product cited: MiniLab 080
Read applicationDirect Single-Molecule Detection in Super Resolution
Publication Title: Direct single-molecule detection and super-resolution imaging with a low-cost portable smartphone-based microscope
Lead facility: University of Fribourg
Moorfield product cited: MiniLab 080
Read applicationPV Compositional Transformation Studies
Publication Title: Compositional Transformation and Impurity‐Mediated Optical Transitions in Co‐Evaporated Cu2 AgBiI6 Thin Films for Photovoltaic Applications
Lead facility: University of Oxford
Moorfield product cited: MiniLab 080
Read applicationHexAuFoil for Ultra-High Resolution cryo-EM
Publication Title: Cryo-EM with sub–1 Å specimen movement
Lead facility: MRC Laboratory of Molecular Biology
Moorfield product cited: MiniLab 080
Read applicationLoad lock and fast entry chamber options
Publication Title: Load lock and fast entry chamber options
Lead facility: Not stated in publication metadata
Moorfield product cited: MiniLab 070, MiniLab 080
Read applicationBioz citation lookup
Publication Title: Bioz citation results for MiniLab 080
Lead facility: Multiple published sources where available in Bioz
Moorfield product cited: MiniLab 080
View Bioz citationsResources and next steps
Related systems
Build the right MiniLab 080 configuration for your research
Tell us about your materials, substrates, process gases and target films. Moorfield will help specify a practical system configuration.
MiniLab 080
MiniLab 080 systems offer tall chambers ideally suited for thermal, LTE and e-beam evaporation techniques requiring longer working distances for optimum uniformity.
MiniLab 080 Modular PVD System
The MiniLab080 offer tall chambers ideally suited for thermal, LTE and e-beam evaporation techniques requiring longer working distances for optimum uniformity.
The tools are ideally suited to evaporation techniques where long working distances are required for best uniformity, and where evaporant incident angles close to 90° allow for optimal results for lift-off applications. However, as well as thermal, LTE and e-beam evaporation, the tools can also be fitted for magnetron sputtering (commonly as a multi-technique system).
Substrate stages, usually at the top of the chamber, can accommodate substrate sizes up to 11” diameter. Substrate heating, rotation, bias and Z-shift are available, together with planetary stages and source and substrate shutters. Configurations range from a manually operated thermal evaporation system up to a multi-technique tool with fully-automated process control.
Key features
- Modular design
- Front-loading D-shaped vacuum chamber
- Turbomolecular and cryo pumping systems
- Base pressures <5 × 10-7 mbar
- Metals, dielectrics and organics deposition
- Up to 11” diameter substrates
- Up to 6 sources
- Touchscreen HMI/PC for system control
- Equipped for easy servicing
- Comprehensive safety features and interlocks
- Cleanroom compatible
- Load-locks available
Example MiniLab Publications
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- Pumping: Turbomolecular or cryogenic high-vacuum pumps, rotary or scroll backing pumps
- Gas/pressure: Manual or automatic control via MFCs and throttle valves
- Load-locks: Single- and multiple-sample
- Stages: Rotation, heating, cooling, Z-shift, bias and planetary
- Shutters: Source and substrate, pneumatic or motorised
- Operation: Manual or automatic via front panels, touchscreen HMI or PC
- Process: Quartz crystal sensor heads for rate/thickness monitoring or feedback-loop control
Example Configurations
System Images
Protect your investment and maximise uptime
Your Moorfield system is a long-term asset that needs to operate reliably and repeatably. A Service Plan is designed to protect your investment by reducing unplanned downtime, improving system reliability, and giving your team faster access to expert support when you need it.
All plans include an annual preventive maintenance visit (with documented checks) plus remote technical support—helpful for troubleshooting issues quickly without waiting for an on-site visit. As your needs increase, higher tiers add greater consumables/parts cover, discounted call-outs and travel, priority scheduling, and training refresher days to help new users get up to speed and reduce avoidable errors.
Service Plans also support easier budgeting (fixed annual or monthly options on eligible tiers) and provide multi-system discounts.
Ask us which plan best fits your throughput demands and budget priorities using our CONTACT US FORM