Skip to content

PVD, CVD and Etch Systems

PVD, CVD and Etch Systems

Menu
Menu

MiniLab 070

MiniLab 070 PVD systems have front-loading box-type chambers and are optimised for magnetron sputtering for substates up to 11″ diameter.

Modular PVD thin film deposition system optimised for magnetron sputtering

MiniLab 070 modular PVD system

Optimised for magnetron sputtering for substrates up to 11″ diameter. The vacuum chamber sits on a double-rack frame that contains all system control electronics and power supplies. MiniLab 070 systems are available with load-locks—please call for details.

Deposition sources are typically mounted on the chamber baseplate, but sputter-down configurations are also available.

Substrate stages, usually at the top of the chamber, can accommodate substrate sizes up to 11” diameter. Substrate heating, rotation, bias and Z-shift are available, together with planetary stages and source and substrate shutters. Configurations range from a manually operated thermal evaporation system up to a multi-technique tool with fully automated process control.

Key features
  • Modular design
  • Front-loading box-type vacuum chamber
  • Turbomolecular and cryo pumping systems
  • Base pressures <5 × 10-7 mbar
  • Metals, dielectrics and organics deposition
  • Up to 11” diameter substrates
  • Up to 4 sources
  • Touchscreen HMI/PC for system control
  • Equipped for easy servicing
  • Comprehensive safety features and interlocks
  • Cleanroom compatible
  • Load-locks available
Options
  • Pumping: Turbomolecular or cryogenic high-vacuum pumps, rotary or scroll backing pumps.
  • Gas/pressure: Manual or automatic control via MFCs and throttle valves.
  • Load-locks: Single- and multiple-sample.
  • Stages: Rotation, heating, cooling, Z-shift, bias and planetary.
  • Shutters: Source and substrate, pneumatic or motorised
  • Operation: Manual or automatic via front panels, touchscreen HMI or PC.
  • Process: Quartz crystal sensor heads for rate/thickness monitoring or feedback-loop control.
Example Configurations
System Images