MiniLab 026 & MiniLab 090
MiniLab 026 and MiniLab 090 systems are glovebox-compatible for atmosphere-sensitive applications for substates up to 6″ and 11″ diameter respectively.
Glovebox PVD Systems
MiniLab 026 systems are compact, glovebox compatible and optimised for magnetron sputtering or thermal evaporation techniques for substrates up to 6″ diameter.
Techniques include thermal and low-temperature evaporation sources (for metals and organics), or magnetron sputtering sources (for metals and inorganics). Deposition sources are typically mounted on the chamber baseplate. Substrate stages are supported from the roof and can accommodate a range of substrate sizes up to 6” diameter. Substrate heating, rotation and Z-shift are available. The MiniLab 026 can be easily retrofitted to an existing glovebox.
Designed for glovebox integration
- ‘Clam-shell’ chamber
- Up to 6” diameter substrates
- Up to 3 sources
- Touchscreen HMI/PC for system control
- Equipped for easy servicing
- Comprehensive safety features and interlocks
MiniLab 090 systems are glovebox-compatible for atmosphere-sensitive applications for substates up to 11″ diameter. Tall chambers are ideal for high-performance evaporation, but magnetron sputtering is also available.
MiniLab 090 systems are floor-standing PVD tools for metals, dielectrics and/or organics deposition. All systems contain a box-type stainless-steel chamber with front and rear doors for glovebox integration (allows for both through-glovebox and external service access).
The chamber has a high aspect-ratio, ideal for long working distances for high uniformity coating via evaporative techniques, but systems can also be equipped with magnetron sputtering. A turbomolecular pumping system is standard, for high-vacuum base pressures of better than 5 × 10-7 mbar. Exact configuration is extremely flexible and dependent on customer budgets and applications. Configurations range from a manually operated thermal evaporation system up to a multi-technique tool with fully-automated process control.
Designed for glovebox integration
- Modular design
- Front sliding door for in-glovebox loading
- Rear door for service access
- Up to 11” diameter substrates
- Comprehensive safety features and interlocks