Small Batch PVD System
Small Batch PVD Coater
Scalable thin-film deposition for startups, SMEs and pilot process development.
The Small Batch Coater page positions MiniLab capability for teams moving from R&D into repeatable small-batch and pilot deposition without the cost and complexity of full production tools.
Research-grade capability without enterprise complexity
This platform is positioned for research teams that need controllable thin-film process access, practical laboratory integration and clear configuration choices.
- Scale from R&D to pilot process development
- Support for metals, dielectrics and organics by configuration
- Load-lock and automation options to improve throughput
- Repeatable recipe-led operation for less experienced users
- Practical cleanroom-ready platform without production-scale complexity
Typical configurations
Use these examples as starting points. Moorfield can refine the final specification around your materials, substrates, gases, recipes and workflow constraints.
Startup and SME pilot coating
For teams that need repeatable thin-film capability before full production tooling.
- Small-batch throughput
- Modular source choices
- Cost-conscious scale-up approach
Load-lock productivity
For faster changeovers and improved vacuum integrity between runs.
- Load-lock option
- Substrate cleaning option
- Reduced chamber exposure
Mask and substrate automation
For repeatable small-batch runs with lower operator burden.
- Automatic mask control
- Repeatable positioning
- Recipe-led operation
Not sure which configuration is right for your research?
Discuss Your ApplicationKey features
Modular research architecture
Configure sources, chambers, stages and monitoring around the research programme.
Multi-technique capability
Combine sputtering, evaporation, e-beam and specialist process modules where required.
Advanced process control
Support for recipe-led workflows, monitoring, gas handling and advanced power options.
Scalable laboratory integration
Move beyond benchtop limits without defaulting to production-scale complexity.
Application-specific options
Glovebox, load-lock, bias, heating and diagnostic options can be specified by project.
Long-term adaptability
The system can be configured and expanded as research priorities evolve.
Options and upgrades
Configure the platform around the process approach, substrate handling, automation and laboratory services your application needs.
Technical specifications
A scannable overview of the core platform. Exact specifications depend on final configuration.
| System type | Small-batch modular PVD |
|---|---|
| Processes | Thermal evaporation, e-beam evaporation and magnetron sputtering methods by configuration |
| Substrate scale | MiniLab configurations up to 11 inch class by configuration |
| Automation | Recipe-driven operation with optional mask/substrate automation |
| Options | Load-lock, dual chamber and throughput-focused configurations |
Applications
Application-library examples from modular MiniLab and nanoPVD workflows relevant to repeatable process development, pilot coating and small-batch research discussions.
Nanoparticle Vacuum Deposition Sources
Publication Title: Nanoparticle Vacuum Deposition Sources
Lead facility: Not stated in publication metadata
Moorfield product cited: MiniLab 125
Read applicationThin Film Bragg Reflector for Monolithic GaAs Devices
Publication Title: Thin Film Bragg Reflector for Monolithic GaAs Devices
Lead facility: Not stated in publication metadata
Moorfield product cited: MiniLab 125
Read applicationCadmium and Zinc-Doped p-type Sb2Se3 Single Crystals
Publication Title: Cadmium and Zinc‐Doped p‐type Sb 2 Se 3 Single Crystals and Solar Cells
Lead facility: University of Liverpool
Moorfield product cited: MiniLab 080
Read applicationHexAuFoil for Ultra-High Resolution cryo-EM
Publication Title: Cryo-EM with sub–1 Å specimen movement
Lead facility: MRC Laboratory of Molecular Biology
Moorfield product cited: MiniLab 080
Read applicationHigh-Efficiency Semitransparent Solar Cells
Publication Title: High‐Efficiency Semitransparent Solar Cells Based on Magnetron Sputtered Sb 2 S 3 Thin Films
Lead facility: Luleå University of Technology
Moorfield product cited: MiniLab 070
Read applicationBenchtop Metal Electrode Deposition – nanoPVD
Publication Title: Synapse-Mimicking Memristors Based on 3,6-Di(tpy)-9-Phenylcarbazole Unimer and Its Copolymer with Cobalt(II) Ions
Lead facility: Charles University
Moorfield product cited: nanoPVD
Read applicationResources and next steps
Related systems
Build the right Small Batch Coater configuration for your research
Tell us about your materials, substrates, process gases and target films. Moorfield will help specify a practical system configuration.
Small Batch Coater
Scalable Thin-Film Deposition
Scalable Thin-Film Deposition for Startups & SMEs
Our MiniLab PVD systems let startups and small enterprises scale from R&D to pilot production—without the cost or complexity of full industrial tools.
Compact and modular, each MiniLab delivers research-grade thin films on substrates up to 11″, with configurations for thermal evaporation, e-beam evaporation, and magnetron sputtering—all in one cleanroom-ready platform.
Key advantages:
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Affordable & space-saving: Entry-level pricing, floor-standing footprint
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Versatile: Metals, dielectrics, and organics in a single system
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Scalable: Options for automation and load-locks to boost throughput
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Precise: Exceptional film uniformity for semiconductors, optics, and advanced tech
With recipe-driven automation, users can run complex multi-layer processes at the touch of a button, ensuring repeatable results and opening the system to inexperienced users. Load-lock modules allow rapid sample changeovers without breaking vacuum, improving productivity and preserving film quality.
From electronic layers and optical coatings to emerging nanotech, MiniLab systems give you the flexibility to innovate faster—right in your own facility.
Example Options
Load Lock
Improve throughput and maintain the integrity of the main chamber with option to add substrate cleaning.
Automatic Substrate & Mask Control
Allows automatic positioning of up to five masks and substrates from parking positions into the deposition position. Allows small batch runs with high degree of repeatability.
Dual Chamber Options
Maximise system flexibility and throughput utilising a dual chamber design. Multiple process steps can be completed without exposing the substrates to atmosphere.
Key features
- Modular design
- Turbomolecular or cryo-pumping systems
- Base pressures <5 × 10-7 mbar
- Metals, dielectrics and organics deposition
- Up to 11” diameter substrates
- Touchscreen HMI/PC for system control
- Equipped for easy servicing
- Comprehensive safety features and interlocks
- Cleanroom compatible
Protect your investment and maximise uptime
Your Moorfield system is a long-term asset that needs to operate reliably and repeatably. A Service Plan is designed to protect your investment by reducing unplanned downtime, improving system reliability, and giving your team faster access to expert support when you need it.
All plans include an annual preventive maintenance visit (with documented checks) plus remote technical support—helpful for troubleshooting issues quickly without waiting for an on-site visit. As your needs increase, higher tiers add greater consumables/parts cover, discounted call-outs and travel, priority scheduling, and training refresher days to help new users get up to speed and reduce avoidable errors.
Service Plans also support easier budgeting (fixed annual or monthly options on eligible tiers) and provide multi-system discounts.
Ask us which plan best fits your throughput demands and budget priorities using our CONTACT US FORM
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