Modular thin-film research platforms
MiniLab Series Modular PVD Systems
Configurable Moorfield MiniLab platforms for research teams that need more chamber, source, automation or integration flexibility than a compact benchtop system can provide.
Flexible modular platforms for evolving research needs
The MiniLab Series supports configurable thin-film deposition workflows across sputtering, evaporation, e-beam deposition, glovebox integration and specialist source options, depending on the selected platform and final specification.
MiniLab Series
Select a modular platform around the required chamber format, substrate scale, process sources, transfer needs and automation level.
Core MiniLab platforms
Compact modular PVDMiniLab 026
Configurable modular platform for deposition sources, substrate stages and process development in research laboratories.
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Front-loading modular PVDMiniLab 030
Compact front-loading MiniLab platform for sputtering, evaporation, e-beam capability and glovebox integration by configuration.
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Modular depositionMiniLab 070
Flexible MiniLab format for research groups needing broader process hardware and laboratory integration options.
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Research PVDMiniLab 080
Research-grade modular deposition platform for advanced thin-film materials, device structures and process development.
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Glovebox compatibleMiniLab 090
Modular PVD platform for air-sensitive materials, protected transfer needs and glovebox-compatible workflows.
View productLarger modular platformMiniLab 125
Larger configurable MiniLab platform for advanced research configurations and more complex process requirements.
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Protected transferGlovebox PVD Systems
Integrated deposition options for atmosphere-sensitive materials and controlled environment research workflows.
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Scale-up developmentSmall Batch Coater
MiniLab-based coating platform for moving from R&D samples toward repeatable small-batch coating work.
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Nanoparticle depositionNanoparticle System
Specialist MiniLab configuration for vacuum deposition of ultra-pure nanoparticles in research environments.
View productWhy choose a MiniLab platform?
Configurable process hardware
Select chambers, sources, substrate handling and gas control around the research workflow.
Multiple deposition techniques
Support sputtering, thermal evaporation, e-beam deposition and specialist sources where configured.
Integration flexibility
Add glovebox, load-lock, transfer and automation capability when the application requires it.
Research to pilot-scale thinking
Develop practical deposition processes before committing to larger production-style infrastructure.
Applications
Advanced materials research
Semiconductor development
Optoelectronics
Energy materials
Nanomaterials
Air-sensitive thin films
Small-batch coating
Device prototyping
Need help choosing a MiniLab configuration?
Request a quotation >Modular PVD Systems with thermal evaporation and sputtering options.
Our Modular MiniLab PVD (Physical Vapor Deposition) Systems offer highly versatile solutions tailored for advanced thin-film coating processes. These systems are customizable to meet various research and production needs, supporting techniques such as magnetron sputtering and thermal evaporation. Designed with scalability in mind, they are ideal for laboratories requiring high-performance deposition systems with adaptable configurations. Options include: substrate plasma clean, heating, cooling, load lock, and automated sample transfer.
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