Scalable Thin-Film Deposition for Startups & SMEs

Our MiniLab PVD systems let startups and small enterprises scale from R&D to pilot production—without the cost or complexity of full industrial tools.

Compact and modular, each MiniLab delivers research-grade thin films on substrates up to 11″, with configurations for thermal evaporation, e-beam evaporation, and magnetron sputtering—all in one cleanroom-ready platform.

Key advantages:

• Affordable & space-saving: Entry-level pricing, floor-standing footprint

• Versatile: Metals, dielectrics, and organics in a single system

• Scalable: Options for automation and load-locks to boost throughput

• Precise: Exceptional film uniformity for semiconductors, optics, and advanced tech

With recipe-driven automation, users can run complex multi-layer processes at the touch of a button, ensuring repeatable results and opening the system to inexperienced users. Load-lock modules allow rapid sample changeovers without breaking vacuum, improving productivity and preserving film quality.

From electronic layers and optical coatings to emerging nanotech, MiniLab systems give you the flexibility to innovate faster—right in your own facility.

Example Options

Load Lock

Improve throughput and maintain the integrity of the main chamber with option to add substrate cleaning.

Automatic Substrate & Mask Control

Allows automatic positioning of up to five masks and substrates from parking positions into the deposition position. Allows small batch runs with high degree of repeatability.