Moorfield Nanotechnology

PVD, CVD and Etch Systems

Moorfield Nanotechnology

PVD, CVD and Etch Systems

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MiniLab 125

Optimised for multi-technique applications, the MiniLab 125 is a modular magnetron sputtering and thermal evaporation PVD system for subrates up to 11″ diameter.

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Modular magnetron sputtering and thermal evaporation PVD thin film deposition system

MiniLab 125 Modular PVD System

Optimised for multi-technique applications, a modular magnetron sputtering and thermal evaporation PVD system for substrates up to 11″ diameter.

Deposition sources are typically mounted on the chamber baseplate, but sputter-down configurations are also available.

Substrate stages, usually at the top of the chamber, can accommodate substrate sizes up to 11” diameter. Substrate heating, rotation, bias and Z-shift are available, together with planetary stages and source and substrate shutters. Configurations range from a manually operated thermal evaporation system up to a multi-technique tool with fully-automated process control.

Product PDF
Key features
  • Modular design
  • Turbomolecular or cryo-pumping systems
  • Base pressures <5 × 10-7 mbar
  • Metals, dielectrics and organics deposition
  • Up to 11” diameter substrates
  • Touchscreen HMI/PC for system control
  • Equipped for easy servicing
  • Comprehensive safety features and interlocks
  • Cleanroom compatible
Example MiniLab Publications
Options
  • Pumping: Turbomolecular or cryogenic high-vacuum pumps, rotary or scroll backing pumps
  • Gas/pressure: Manual or automatic control via MFCs and throttle valves
  • Load-locks: Single- and multiple-sample
  • Stages: Rotation, heating, cooling, Z-shift, bias and planetary
  • Shutters: Source and substrate, pneumatic or motorised
  • Operation: Manual or automatic via front panels, touchscreen HMI or PC
  • Process: Quartz crystal sensor heads for rate/thickness monitoring or feedback-loop control
Example Configurations
Thermal Configuration

Thermal Configuration

Four high temperature thermal evaporation sources
E-beam Thermal Evaporation Configuration

E-beam Thermal Evaporation Configuration

E-beam thermal evaporation source and two high temperature sources
Combined E-beam and Magnetron Sputtering Configuration

Combined E-beam and Magnetron Sputtering Configuration

E-beam thermal evaporation source and four 3″ magnetron sources
System Images
Array of three magnetron sources in confocal arrangement shown in thin film deposition system chamber.
Array of three magnetron sources in confocal arrangement in thin film deposition system.
Magnetron source arrangement on PVD system showing the connections.
MiniLab125 thin film deposition system with load lock
PCD thin film deposition system load lock and substrate loading.
MiniLab125 modular PVD thin film deposition system for magnetron sputtering or thermal evaporation.
Protect your investment and maximise uptime

Your Moorfield system is a long-term asset that needs to operate reliably and repeatably. A Service Plan is designed to protect your investment by reducing unplanned downtime, improving system reliability, and giving your team faster access to expert support when you need it.

All plans include an annual preventive maintenance visit (with documented checks) plus remote technical support—helpful for troubleshooting issues quickly without waiting for an on-site visit. As your needs increase, higher tiers add greater consumables/parts cover, discounted call-outs and travel, priority scheduling, and training refresher days to help new users get up to speed and reduce avoidable errors.

Service Plans also support easier budgeting (fixed annual or monthly options on eligible tiers) and provide multi-system discounts.

Ask us which plan best fits your throughput demands and budget priorities using our CONTACT US FORM