2D materials research
Deposition & Plasma Processing for 2D Materials Research
Flexible thin-film deposition and low-damage plasma processing systems for graphene, transition metal dichalcogenides and advanced nanomaterials.
Process control for rapidly evolving materials science
2D materials research depends on precise process control and low-damage material handling.
Graphene growth
CVD capability for graphene and nanomaterials workflows.
Thin-film deposition
Contacts, electrodes and supporting functional films.
Plasma etching
Controlled low-damage plasma processing.
Device fabrication
Surface modification and heterostructure workflows.
Recommended products
nanoETCH
Low-damage plasma processing.
nanoPVD
Controlled thin-film deposition.
nanoCVD
Graphene growth.
MiniLab Series
Advanced integrated research workflows.