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A high-performance, high-vacuum PVD system in a compact package for benchtop location. Superior, efficient performance for a multitude of R&D thin-film deposition applications.

nanoPVD Range Overview:

Moorfield have recently introduced the nanoPVD series of deposition systems.

Compact and suitable for benchtop location—but not to be confused with microscopy-related products—nanoPVD system design is derived from proven R&D thin-film system technology such as that used in our flagship MiniLab range.

Developed in collaboration with leading academic groups, nanoPVD tools are optimised for ease-of-use, represent outstanding value for money and are ideal where available space and budgets are key considerations—without compromising on quality of results.

The nanoPVD range now consists of multiple models covering both magnetron sputtering and thermal evaporation deposition techniques. For further details, see the links at the bottom of this page.

Key Features:

Features common to all nanoPVD tools include:

  • Benchtop configuration
  • Fully automatic operation via touchscreen HMI
  • Define/save multiple process recipes
  • PC connection for data-logging
  • Base pressures <5 × 10-7 mbar
  • Heating, Z-shift and rotation stages (optional)
  • Equipped for easy servicing
  • Comprehensive safety features
  • Cleanroom compatible
  • Proven performance
  • Short lead times
  • Outstanding value for money

Check out the range below, and contact us to discuss your project today!

Model S10A

Magnetron sputtering with RF and/or DC power

Benchtop, turnkey system for high-performance magnetron sputtering. Up to 3 sources for 2″ targets, RF and DC power supplies, and up to 3 MFC-controlled process gas lines for standard or reactive sputtering.

Model S10A, Wide-Area (WA) configuration

Magnetron sputtering, wide-area

The nanoPVD-S10A-WA system is an enhanced, application-specific version of the model S10A that allows for even coating on substrates up to 8″ diameter.

Model T15A

Thermal evaporation for organics and metals deposition

Benchtop, turnkey system for high-performance evaporation. Up to 4 low-temperature evaporation (LTE) sources for organics and 2 standard thermal evaporation sources for metals.

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