The units implement the cold-wall variant of the CVD method, enabling reduced contamination, low running costs and better control as compared to tube-furnace counterparts.
User operation is via a touchscreen HMI and is recipe-based, with all hardware being fully automated. Comprehensive safety features protect users and the system itself. Included PC software enables data-logging and offline recipe definition. All units come with expert support.
Systems are quick to install and ideal for research groups requiring ongoing rapid access to high-quality graphene for R&D applications.
The nanoCVD-8G is available with a rotary or scroll (dry) backing pump.
The nanoCVD-8G requires inert service gas, high-purity process gases (argon, hydrogen and methane) and electrical power.
Macháč, P., et al. Journal of Electrical Engineering 2017 DOI: […]
Macháč, P., et al. ElectroScope 2016 The paper demonstrates the […]