MiniLab 125 tools take the modular concept to the pilot-scale level. Large chambers allow for increased-size component sets for coating large areas, and a range of load-lock options enable high-throughput operation. At the same time, systems are fully customisable to match specific applications.
Techniques: Thermal evaporation // Low-temperature thermal evaporation (LTE) // E-beam evaporation // Magnetron sputtering
MiniLab 125 systems are floor-standing vacuum evaporators for metal, dielectric and/or organics thin-film deposition. All systems contain a box-type stainless-steel chamber with a front door for loading/unloading. Large chamber volumes enable large sources for pilot-scale coating or multiple techniques for a flexible R&D tool. Systems are available fitted with all major deposition techniques and stages customised to specific substrates.
Turbomolecular pumping systems are standard, for high-vacuum base pressures of better than 5 × 10-7 mbar. Exact setup is extremely flexible and dependent on customer budget and applications.
All MiniLab 125 tools require chilled water, dry compressed air, nitrogen for venting (optional) and electrical power (three-phase for e-beam evaporation). Sputtering systems also require process gases (argon, oxygen and nitrogen). Exact requirements will be provided with quotations or on request.