Magnetron sputtering
Magnetron Sputtering Systems

Moorfield design & manufacture superior PVD systems for research & Development

Magnetron sputtering
Magnetron Sputtering Systems

Choose from our range of flexible and budget-friendly solutions

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Minilab magnetron sputtering systems

The MiniLab range from Moorfield: Flexible, modular PVD systems for high-quality R&D and pilot-scale production.

MiniLab 026

MiniLab 026

MiniLab 026 systems are compact floor standing vacuum evaporators with easy-access ‘clam-shell’ chambers. Suitable for metal, dielectric and organics deposition via evaporation and sputtering techniques.

MiniLab systems

MiniLab 060

MiniLab 060 systems have cubic chambers ideal for magnetron sputtering (up to 4 × 3″ diameter sources), but that can also be fitted with evaporation components. The smallest MiniLab that can be fitetd with a load-lock

MiniLab 080

MiniLab 080

Tall chambers ideally suited for evaporation techniques that require longer working distances for optimum uniformity.

MiniLab 090

Glovebox-compatible chambers with front and rear doors that are suitable for supporting all major deposition techniques.

MiniLab Systems

MiniLab 125

Large cubic chambers for large-scale R&D up to pilot-scale production. Capable of holding all PVD techniques, and can be fitted with load-locks and planetary stages for high-throughput operation.

UltraLab

UltraLab

UltraLab systems are equipped with UHV compatible cylindrical process chambers and load locks. A range of chamber sizes and geometries are available to provide for various deposition techniques.

nanoPVD magnetron sputtering systems

A high-performance, high-vacuum PVD system in a compact package for benchtop location. Superior, efficient performance for a multitude of R&D thin-film deposition applications.

nanoPVD S10A

nanoPVD-S10A

Benchtop, turnkey system for high-performance magnetron sputtering. Up to 3 sources for 2″ targets, RF and DC power supplies, and up to 3 MFC-controlled process gas lines for standard or reactive sputtering.

nanoPVD S10A

nanoPVD-S10A-WA

(Wide angle Version of the nanoPVD-S10A). The nanoPVD-S10A-WA system is an enhanced, application-specific version of the model S10A that allows for even coating on substrates up to 8″ diameter.


Other magnetron sputtering systems

nanoEM

nanoEM

High-performance coating for electron microscopy applications.

The nanoEM system is the first electron microscopy (EM) coating tool with a full research-grade feature set.

Edwards e306

Edwards e306

We provide service, repair and refurbishments for the Edwards E306.

We have highly experienced engineers who can refurbish, re-engineer and service your unit. We can also provide frequently-used spare parts.


See also…

Magnetron sputtering

Knowledgebase

Magnetron sputtering

Confocal magnetron sputtering

Knowledgebase

Confocal magnetron sputtering

Components and parts

Components & parts

Consumables and Spares