Moorfield design & manufacture superior PVD systems for research & Development
Choose from our range of flexible and budget-friendly solutions
Minilab magnetron sputtering systems
The MiniLab range from Moorfield: Flexible, modular PVD systems for high-quality R&D and pilot-scale production.
MiniLab 026 systems are compact floor standing vacuum evaporators with easy-access ‘clam-shell’ chambers. Suitable for metal, dielectric and organics deposition via evaporation and sputtering techniques.
MiniLab 060 systems have cubic chambers ideal for magnetron sputtering (up to 4 × 3″ diameter sources), but that can also be fitted with evaporation components. The smallest MiniLab that can be fitetd with a load-lock
Tall chambers ideally suited for evaporation techniques that require longer working distances for optimum uniformity.
Glovebox-compatible chambers with front and rear doors that are suitable for supporting all major deposition techniques.
Large cubic chambers for large-scale R&D up to pilot-scale production. Capable of holding all PVD techniques, and can be fitted with load-locks and planetary stages for high-throughput operation.
UltraLab systems are equipped with UHV compatible cylindrical process chambers and load locks. A range of chamber sizes and geometries are available to provide for various deposition techniques.
nanoPVD magnetron sputtering systems
A high-performance, high-vacuum PVD system in a compact package for benchtop location. Superior, efficient performance for a multitude of R&D thin-film deposition applications.
Benchtop, turnkey system for high-performance magnetron sputtering. Up to 3 sources for 2″ targets, RF and DC power supplies, and up to 3 MFC-controlled process gas lines for standard or reactive sputtering.
(Wide angle Version of the nanoPVD-S10A). The nanoPVD-S10A-WA system is an enhanced, application-specific version of the model S10A that allows for even coating on substrates up to 8″ diameter.
Other magnetron sputtering systems
High-performance coating for electron microscopy applications.
The nanoEM system is the first electron microscopy (EM) coating tool with a full research-grade feature set.
We provide service, repair and refurbishments for the Edwards E306.
We have highly experienced engineers who can refurbish, re-engineer and service your unit. We can also provide frequently-used spare parts.
Confocal magnetron sputtering
Components & parts
Consumables and Spares