Magnetron sputtering
Low temperature evaporation systems

High quality, budget-friendly thermal evaporation systems (LTE) for R&D

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Minilab low temperature evaporation systems

The MiniLab range from Moorfield: Flexible, modular PVD systems for high-quality R&D and pilot-scale production.

MiniLab 026

MiniLab 026

MiniLab 026 systems are compact floor standing vacuum evaporators with easy-access ‘clam-shell’ chambers. Suitable for metal, dielectric and organics deposition via evaporation and sputtering techniques.

MiniLab systems

MiniLab 060

MiniLab 060 systems have cubic chambers ideal for magnetron sputtering (up to 4 × 3″ diameter sources), but that can also be fitted with evaporation components. The smallest MiniLab that can be fitetd with a load-lock

MiniLab 080

MiniLab 080

Tall chambers ideally suited for evaporation techniques that require longer working distances for optimum uniformity.

MiniLab 090

Glovebox-compatible chambers with front and rear doors that are suitable for supporting all major deposition techniques.

MiniLab Systems

MiniLab 125

Large cubic chambers for large-scale R&D up to pilot-scale production. Capable of holding all PVD techniques, and can be fitted with load-locks and planetary stages for high-throughput operation.

UltraLab

UltraLab

UltraLab systems are equipped with UHV compatible cylindrical process chambers and load locks. A range of chamber sizes and geometries are available to provide for various deposition techniques.


Other low temperature evaporation systems

Moorfield M307

Moorfield M307

Entry-level vacuum evaporator that enables high-quality thin films at an affordable price.

The system is flexible and retains an upgrade path in line with the product philosophy of the MiniLab range.

nanoPVD-T15A

nanoPVD-T15A

Thermal evaporation for organics and metals deposition

Benchtop, turnkey system for high-performance evaporation. Up to 4 low-temperature evaporation (LTE) sources for organics and 2 standard thermal evaporation sources for metals.


See also…

Low temperature evaporation

Knowledgebase

Low temperature evaporation

Source selection for thermal evaporation

Knowledgebase

Source selection for thermal evaporation