Plasma etching is an excellent way to clean substrate surfaces, promote adhesion and optimise sample quality layers
Glovebox Deposition integrated MiniLab PVD systems for metals, inorganics and organics thin-film deposition with sample handling in inert environments.
Glovebox-integrated MiniLab systems for metals, inorganics and organics thin-film deposition with sample handling in inert environments
MiniLab systems suitable for glovebox-integration are the MiniLab 026 and the MiniLab 090. The smaller MiniLab 026 sits in a glovebox floor, while the MiniLab 090 fits to the rear of a purpose-designed glovebox and provides front and rear doors for in-glovebox and external access (e.g., for convenient service access).
Glovebox integration with Moorfield systems
The MiniLab 026 and 090 tools can be fitted with key PVD techniques:
Single or multiple technique configurations can be supplied.