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Glovebox deposition

Glovebox Deposition integrated MiniLab PVD systems for metals, inorganics and organics thin-film deposition with sample handling in inert environments.

Glovebox-integrated MiniLab systems for metals, inorganics and organics thin-film deposition with sample handling in inert environments

MiniLab systems suitable for glovebox-integration are the MiniLab 026 and the MiniLab 090. The smaller MiniLab 026 sits in a glovebox floor, while the MiniLab 090 fits to the rear of a purpose-designed glovebox and provides front and rear doors for in-glovebox and external access (e.g., for convenient service access).

Glovebox integration with Moorfield systems

The MiniLab 026 and 090 tools can be fitted with key PVD techniques:

  • Thermal Evaporation
  • Low-temperature thermal evaporation (LTE)
  • Magnetron sputtering

Single or multiple technique configurations can be supplied.

MiniLab 026

Compact, floor standing vacuum evaporators with easy-access ‘clam-shell’ chambers

MiniLab 090

MiniLab 090

With a tall chamber – ideal for high-performance evaporation

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