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Glovebox Annealing Integrated MiniLab systems with annealing hardware for substrate heating under controlled conditions, and transfer to/from inert atmospheres.
A variety of R&D applications require substrate heating under controlled conditions, e.g., for device or functional material preparation
Often, sample transfer to and from inert atmospheres is a co-requirement and in this case Moorfield are able to assist.
Glovebox-compatible MiniLab 026 systems can be fitted with a variety of heating technologies:
Heating stages for substrate diameters up to 6″ are available.
In addition, tools can be fitted with MFC-controlled process gases and fully-automatic pressure control.