Plasma etching is an excellent way to clean substrate surfaces, promote adhesion and optimise sample quality layers
Glovebox Annealing Integrated MiniLab systems with annealing hardware for substrate heating under controlled conditions, and transfer to/from inert atmospheres.
A variety of R&D applications require substrate heating under controlled conditions, e.g., for device or functional material preparation
Often, sample transfer to and from inert atmospheres is a co-requirement and in this case Moorfield are able to assist.
Glovebox-compatible MiniLab 026 systems can be fitted with a variety of heating technologies:
Heating stages for substrate diameters up to 6″ are available.
In addition, tools can be fitted with MFC-controlled process gases and fully-automatic pressure control.