Glovebox deposition

Glovebox Deposition integrated MiniLab PVD systems for metals, inorganics and organics thin-film deposition with sample handling in inert environments.

Glovebox-integrated MiniLab systems for metals, inorganics and organics thin-film deposition with sample handling in inert environments

MiniLab systems suitable for glovebox-integration are the MiniLab 026 and the MiniLab 090. The smaller MiniLab 026 sits in a glovebox floor, while the MiniLab 090 fits to the rear of a purpose-designed glovebox and provides front and rear doors for in-glovebox and external access (e.g., for convenient service access).Get a quotenanoETCH system at ICFO, Spain (far right of image), together with glovebox-integrated Moorfield annealing and e-beam evaporation systems.

Glovebox integration with Moorfield systems

The MiniLab 026 and 090 tools can be fitted with key PVD techniques:

  •  Thermal Evaporation
  •  Low-temperature thermal evaporation (LTE)
  •  Magnetron sputtering

Single or multiple technique configurations can be supplied.

Moorfield systems for Glovebox deposition:

MiniLab 090

MiniLab 090

MiniLab 090 systems are glovebox-compatible for atmosphere-sensitive applications. Tall chambers are ideal for high-performance evaporation, but magnetron sputtering is also available.

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MiniLab 026

MiniLab 026

MiniLab 026 systems are compact floor standing vacuum evaporators with easy-access ‘clam-shell’ chambers. Suitable for metal, dielectric and organics deposition via evaporation and sputtering techniques.

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Recent posts about Glovebox deposition:

ICFO

ICFO

ICFO – The Institute of Photonic Sciences is a research center devoted to the science and technology of light. Located in Castelldefels, Barcelona, Spain

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