Glovebox annealing

Glovebox Annealing Integrated MiniLab systems with annealing hardware for substrate heating under controlled conditions, and transfer to/from inert atmospheres.

A variety of R&D applications require substrate heating under controlled conditions, e.g., for device or functional material preparation

Often, sample transfer to and from inert atmospheres is a co-requirement and in this case Moorfield are able to assist.

Glovebox-compatible MiniLab 026 systems can be fitted with a variety of heating technologies:

  •  Quartz lamp: This technology uses quartz lamps to generate IR radiation. A cost-effective means of heating for substrate temperatures up to 500 °C, and compatible with most atmospheres.
  •  Carbon-carbon composite (CCC): Where substrate temperatures above 500 °C are required, CCC elements are used. Suitable for heating up to 1000 °C.
  •  SiC-coated CCC: When high temperatures and oxygen resistance are required, CCC elements are coated with a resistant layer of SiC.

Heating stages for substrate diameters up to 6″ are available.

In addition, tools can be fitted with MFC-controlled process gases and fully-automatic pressure control.

Moorfield systems for Glovebox annealing:

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