Metal-insulator-metal diodes based on alkyltrichlorosilane self-assembled monolayers

This paper reports the fabrication metal-insulator-metal (MIM) diodes based on alkyltrichlorosilane self-assembled monolayers (SAMs) and investigation of the effects of parameters such as alkyl chain length on the electronic properties, for applications in high speed electronics.

Devices are formed by sandwiching the SAM layers between metal films—deposited using a MiniLab 080 electron-beam evaporation tool.

MiniLab 080 E-beam system
MiniLab 080 E-beam system

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