Schedin, F., et al. Nature Materials 2007 DOI: 10.1038/nmat1967
Micrometre-size sensors made of graphene are shown capable of detecting when a single gas molecule attaches to the sensor’s surface. Moorfield ‘soft etching’ technology is used to prepare substrates for mechanical exfoliation of graphene, and for etching the graphene into the required (Hall bar) device structures.
Link: http://www.nature.com/nmat/journal/v6/n9/abs/nmat1967.html#abs
Moorfield products: Soft-Etching systems