Developed in collaboration with academic partners, nanoCVD technology is proven for the rapid throughput production of high-quality graphene for R&D applications via the well-established chemical vapour deposition (CVD) route that is considered most promising for future commercialisation of graphene-based technologies.
Model nanoCVD-WGP is the result of the scaling of this technology to the wafer scale (3” or 4”), together with the addition of plasma-enhanced capability in a cold-walled chamber. While this represents a significant leap in the capabilities of the nanoCVD range, intelligent design means the compact nature of the units has been maintained for efficient location and integration.
Growth schemes
Compatible with numerous CVD methods:
- Substrates: Cu, Ni, etc. (films or foils)
- Feedstocks: CH4, C2H4, solids (PMMA), etc.
- Process gases: H2, Ar, N2, etc.
