nanoCVD-8N

A compact, turn-key and scalable CVD system for high-throughput carbon nanotube synthesis – with proven performance.
nanoCVD-8N
Techniques

The nanoCVD-8N provides precise control over conditions such as temperature and gas chemistry that are critical for reproducible production of surface-bound carbon nanotube (CNT) arrays, primarily the single-walled form.

Developed in collaboration with leading academic partners, the units implement the cold-wall variant of the CVD method, enabling reduced contamination, low running costs and better control as compared to tube-furnace counterparts.

User operation is via a touchscreen HMI and is recipe-based, with all hardware being fully automated. Comprehensive safety features protect users and the system itself. Included PC software enables data-logging and offline recipe definition. All units come with expert support.

Systems are quick to install and ideal for research groups requiring ongoing rapid access to high-quality CNTs for R&D applications.

Depending on recipes and substrate/catalyst combinations, nanoCVD-8N units can create different CNT morphologies:

  • Random: Multiply interconnected SWNTs
  • Aligned: Parallel SWNTs
  • ‘Forests’: Vertically stacked SWNTs

CNTS can be formed using a variety of substrates, such as SiO2/Si, Si3N4 and quartz, while typical catalysts include nanoparticles of Fe, Co and Ni.

Key features
  • Ultra-compact, benchtop, atmospheric-pressure CVD system
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  • Reproducible synthesis of high-quality carbon nanotubes
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  • Optimised for single-walled carbon nanotubes
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  • Precise control of conditions
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  • 1100 °C maximum temperature
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  • MFC-controlled process gases (argon, hydrogen and methane)
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  • 20 × 40 mm2 maximum substrate size
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  • Process times <30 minutes
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  • Fully-automatic
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  • User-friendly, touchscreen interface
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  • Define/save multiple growth recipes
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  • PC connection for data-logging
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  • Equipped for easy servicing
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  • Comprehensive safety features
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  • Cleanroom compatible
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  • Proven performance
  • Options
  • The nanoCVD-8N is available with a rotary or scroll (dry) backing pump
  • Typical configurations

    The nanoCVD-8N is a standardised system.

    Service requirements

    The nanoCVD-8N requires inert service gas, high-purity process gases (argon, hydrogen and methane) and electrical power.

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