Glovebox Systems for Soft-Etching


"Soft etching"

  • Soft-etching system based on MiniLab 026 system, glovebox-integrated at the Manchester National Graphene Institute (NGI)

  • Soft-etching system based on MiniLab 026 system, tested and ready for installation

  • Combined soft-etching and annealing system based on MiniLab 026 system, ready for installation

  • Soft-etching stage inside glovebox-ready MiniLab 026 tool

  • MiniLab 026 custom lid for glovebox-based soft-etching for graphene and 2D materials applications


Moorfield introduce their glovebox-integrated MiniLab 026 “soft-etching” tools for researchers working on graphene and 2D materials that require sample handling in inert atmospheres.

Graphene and 2D materials research often requires sample handling in inert environments. With etching also a common requirement, Moorfield now offer glovebox-integrated MiniLab 026 systems with soft-etching hardware built in.

Soft-etching technology provides low plasma powers with high-resolution control, and is ideal for multiple applications:

  • Substrate preparation for mechanical exfoliation
  • Material patterning
  • Defect engineering

More Information:

For more information on MiniLab 026 systems and soft-teching technology, see the following pages:

Contact us today to discuss your application!

© 2018 Moorfield Nanotechnology Limited.