Components, parts and services from Moorfield

nanoCVD spares

Replacement o-ring for chamber door of nanoCVD-8G system. Formed from Viton….
Kit contains: Ceramic heater element support plate, ceramic substrate support top piece. Allows for replacing ceramic top and bottom pieces of nanoCVD-8G heater stage….
Kit contains: Carbon-carbon composite heater element, ceramic bolts × 2, ceramic bush x 2, power legs × 2, graphite washers × 2. Allows for…
Allows for complete rebuild of nanoCVD heater stage. Kit contains: Carbon-carbon composite heater element, ceramic bolts × 2, ceramic bush x 2, power legs…

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