nanoCVD Spares

We have full availability on spare components for Moorfield’s nanoCVD systems.


Door o-ring for nanoCVD-8G system

Door o-ring for nanoCVD-8G system

Replacement o-ring for chamber door of nanoCVD-8G system. Formed from Viton.

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Heater assembly power delivery spares kit for nanoCVD-8G system

Heater assembly power delivery spares kit for nanoCVD-8G system

Kit contains: Carbon-carbon composite heater element, ceramic bolts × 2, ceramic bush x 2, power legs × 2, graphite washers × 2. Allows for rebuild of power delivery section of nanoCVD-8G heater stage.

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Heater assembly ceramic spares kit for nanoCVD-8G system

Heater assembly ceramic spares kit for nanoCVD-8G system

Kit contains: Ceramic heater element support plate, ceramic substrate support top piece. Allows for replacing ceramic top and bottom pieces of nanoCVD-8G heater stage.

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Replacement heater assembly for nanoCVD-8G system

Replacement heater assembly for nanoCVD-8G system

Allows for complete rebuild of nanoCVD heater stage. Kit contains: Carbon-carbon composite heater element, ceramic bolts × 2, ceramic bush x 2, power legs × 2, graphite washers × 2. Ceramic heater element support plate, ceramic substrate support top piece.

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