Deposition Sources for Magnetron Sputtering

High-strength magnet pack for 4″ MAGNETRON

For depositing materials with high magnetic permeability, an increased-strength magnet pack is required to allow the field to permeate through the target such that correct plasma properties can be achieved. Balanced profile as standard. Easy fitting procedure.

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High-strength magnet pack for 3″ MAGNETRON

For depositing materials with high magnetic permeability, an increased-strength magnet pack is required to allow the field to permeate through the target such that correct plasma properties can be achieved. Balanced profile as standard. Easy fitting procedure.

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4" MAGNETRON for sputtering

4″ MAGNETRON for sputtering

High-vacuum magnetron sputtering head for industry-standard 4″ diameter targets. Accepts target thicknesses from 1/16″ to 1/4″. Easy target replacement and maintenance. Available with or without FlexiHead mounting for variable head angle and in-chamber height-adjustment (image shows model with FlexiHead option). Provided with tube stub for 1″ bolt baseplate feedthroughs as standard. Also available flange-mounted. Water-cooled and suitable for accepting RF, DC or pulsed DC power.

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3" MAGNETRON for sputtering

3″ MAGNETRON for sputtering

High-vacuum magnetron sputtering head for industry-standard 3″ diameter targets. Accepts target thicknesses from 1/16″ to 1/4″. Easy target replacement and maintenance. Available with or without FlexiHead mounting for variable head angle and in-chamber height-adjustment (image shows model with FlexiHead option). Provided with tube stub for 1″ bolt baseplate feedthroughs as standard. Also available flange-mounted. Water-cooled and suitable for accepting RF, DC or pulsed DC power.

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High-strength magnet pack for 2″ MAGNETRON

For depositing materials with high magnetic permeability, an increased-strength magnet pack is required to allow the field to permeate through the target such that correct plasma properties can be achieved. Balanced profile as standard. Easy fitting procedure.

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2" MAGNETRON for sputtering

2″ MAGNETRON for sputtering

High-vacuum magnetron sputtering head for industry-standard 2″ diameter targets. Accepts target thicknesses from 1/16″ to 1/4″. Easy target replacement and maintenance. Available with or without FlexiHead mounting for variable head angle and in-chamber height-adjustment (image shows model with FlexiHead option). Provided with tube stub for 1″ bolt baseplate feedthroughs as standard. Also available flange-mounted. Water-cooled and suitable for accepting RF, DC or pulsed DC power.

Get a Quote