Moorfield Nanotechnology

UK Laboratory Equipment Specialists in PVD (Physical Vapour Deposition), CVD (Chemical Vapour Deposition) and Etch Systems

Our systems are used for academic and industrial research, including semiconductors, photovoltaics, graphene and 2D materials.

Moorfield’s world-class scientific laboratory equipment is built to match your research needs. We can also service and repair existing tools, and provide advice relating to a custom project.

Solutions

Magnetron sputtering

In magnetron sputtering, magnetic fields focus plasmas onto target material surfaces, ejecting material that moves through the plasma to coat substrates. Suitable for depositing most materials (with correct choice of sputtering power supply).
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E-beam evaporation

During electron beam evaporation (or E-Beam evaporation), evaporant materials are heated to high temperatures through bombardment by high-energy electron streams.
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Soft-etching

Soft-etching technology from Moorfield is unique in providing the fine control needed for substrate and device preparation in world-leading 2D materials research.
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Thermal evaporation

Thermal evaporation is a straightforward means of thin film deposition with materials being heated to evaporation temperatures via a resistively heated support.
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Thermal processing

Complete thermal processing systems and bespoke components for high-temperature sample processing under controlled low-pressure, inert and reactive atmospheres.
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Glovebox annealing

Glovebox Annealing Integrated MiniLab systems with annealing hardware for substrate heating under controlled conditions, and transfer to/from inert atmospheres.
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Glovebox deposition

Glovebox Deposition integrated MiniLab PVD systems for metals, inorganics and organics thin-film deposition with sample handling in inert environments.
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Glovebox soft-etching

Moorfield introduce their glovebox-integrated MiniLab 026 “soft-etching” tools for researchers working on graphene and 2D materials that require sample handling in inert atmospheres.
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Our products

nanoCVD

nanoCVD

Benchtop CVD systems for high-quality graphene and carbon nanotube synthesis, with rapid operation for on-demand sample production.

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MiniLab 080

MiniLab

The MiniLab range from Moorfield: Flexible, modular PVD systems for high-quality R&D and pilot-scale production.

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nanoPVD

nanoPVD

A high-performance, high-vacuum PVD system in a compact package for benchtop location. Superior, efficient performance for a multitude of R&D thin-film deposition applications.

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nanoETCH

nanoETCH

The nanoETCH implements Moorfield’s unique soft-etching technology and provides the fine etching control crucial for graphene and 2D materials research in a convenient, benchtop package.

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nanoEM

The nanoEM system is the first electron microscopy coating tool with a full, research-grade feature set.

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ANNEAL

ANNEAL

High-temperature vacuum annealing for planar substrates, up to 1000 °C, with precision gas and pressure control—all in a benchtop package.

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Expert-level support
Worldwide distribution
Worldwide distribution
Compact footprint
Compact footprint
Research grade
Research-grade
Multiple techniques
Multiple techniques
Custom design
Cleanroom compatible
Cleanroom compatible
Powerful software

Knowledge base articles

Graphene soft-etching with the nanoETCH

Moorfield graphene soft-etching technology allows for the controlled removal of graphene and 2D materials, without cross-linking photoresists that can lead to residual contamination that affects device performance.

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Confocal magnetron sputtering

Confocal magnetron sputtering

Confocal magnetron sputtering is now routinely employed for the production of excellent uniformity, multi-layer films by magnetron sputtering. This application note describes the technology, and explains the principles behind it.

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Testimonials

Denmark Technical University
Evonetix
ICFO
University of Pisa
manchester metropolitan university
Northumbria University
University of Bath
University of Manchester

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