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    • Magnetron sputtering
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    • Low temperature evaporation
    • Plasma-etching
    • Chemical vapour deposition
    • Thermal processing
    • Glovebox integrated systems
      • Glovebox annealing
      • Glovebox soft-etching
      • Glovebox deposition
    • Nanoparticle Vacuum Deposition
  • Products
    • MiniLab
      • MiniLab 026
      • MiniLab 060
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    • nanoPVD
      • nanoPVD-S10A
      • nanoPVD-S10A-WA
      • nanoPVD-T15A
      • nanoPVD-ST15A
    • nanoCVD
      • nanoCVD-8G
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  • Components and Services
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    • Magnetron sputtering
    • Thermal evaporation
    • E-beam evaporation
    • Low temperature evaporation
    • Plasma-etching
    • Chemical vapour deposition
    • Thermal processing
    • Glovebox integrated systems
      • Glovebox annealing
      • Glovebox soft-etching
      • Glovebox deposition
    • Nanoparticle Vacuum Deposition
  • Products
    • MiniLab
      • MiniLab 026
      • MiniLab 060
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      • MiniLab 090
      • MiniLab 125
    • nanoPVD
      • nanoPVD-S10A
      • nanoPVD-S10A-WA
      • nanoPVD-T15A
      • nanoPVD-ST15A
    • nanoCVD
      • nanoCVD-8G
      • nanoCVD-8N
      • nanoCVD-WG(P)
    • nanoETCH
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  • Components and Services
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