Nanoparticle Vacuum Deposition Sources

Nanoparticle Vacuum Deposition Sources

At their heart, these sources consist of 1–3 magnetron sputtering sources. Material generated from these passes down an extended tube where it aggregates into nanoparticles of sizes 1–20 nm. At the end of the tube, the nanoparticles are ejected through an orifice into a process chamber where they coat a supported substrate. Applications of vacuum-deposited […]

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