The M307 is a floor-standing evaporation tool optimised for uniform deposition onto substrates with maximum diameters of 6”, and is capable of standard thermal evaporation for metals and low-temperature evaporation (LTE) for organics.
All power supplies and controller units are fully integrated within the system electronics rack. The vacuum chamber is a glass bell-jar and is fitted with removable deposition shielding for minimised cross-contamination. The pumping system is based on a turbomolecular pump, with both rotary and scroll-type backing pumps available.
The M307 is an extremely compact system optimised for ease of use but without compromising the film qualities provided. It represents outstanding value for money. It even has its own onboard water-cooling system making installation a simple task.
All nanoPVD-S10A systems require chilled water, dry compressed air, nitrogen for venting (optional), process gas supplies, and electrical power.
Exact requirements will be provided with quotations or on request.