Soft Etching

Developed with the Nobel Prize winning graphene group at Manchester University, UK, etching technology from Moorfield is unique in providing the fine control needed for substrate and device preparation in world-leading 2D materials research.

Headed by Prof. Andre Geim, the graphene group at Manchester University received their first etching system from Moorfield when they started their 2D materials research over 10 years ago. Since then, the system has become a critical part of all experimental work.

Moorfield etching technology is optimised for providing the fine control required for substrate and device preparation in graphene and 2D materials research:

  • Substrate preparation for mechanical exfoliation: When preparing 2D material ‘flakes’ via mechanical exfoliation (also known as the sticky-tape method), the nature of the substrate surface is crucial. Moorfield nanoETCH tools are now being used to obtain the topological and chemical substrate surface properties necessary for producing large flake areas.
  • 2D material patterning: Given their thinness, 2D materials are fragile and require finely-controlled etching conditions for device fabrication. Soft etching technology provides this control, and also allows for patterning without cross-linking common mask photoresists (e.g., PMMA).
  • Defect engineering: A key research theme for graphene science is defect engineering. Through controlled low plasma-powers, nanoETCH systems are being used for creating point defects in lattices for implementing control over this aspect of the material. A soft-etching approach is necessary for reproducible results and to avoid uncontrolled material destruction.

Moorfield technology is unique and offers unmatched performance for these applications. In recognition of this, we have recently installed 3 etching systems into the new National Graphene Institute in the UK.

We can now offer a dedicated nanoETCH system, incorporate the technology into our MiniLab tools, or provide components and advice for their retrofitting.

nanoETCH Systems

nanoETCH Systems

Dedicated soft-etching instruments.

Built around Moorfield soft-etching technology for 2D materials research. Benchtop and easy-to-use, they offer rapid substrate and device processing.

MiniLab Systems

MiniLab Systems

Flexible systems fitted with etching components.

Our flagship MiniLab range can be fitted with etching technology including alongside traditional thin film deposition components. Allows for highly-flexible, multi-purpose systems.

Etching components

Etching Components

Retrofit your existing system.

Soft-etching components and spares for incorporation into your existing system. Please contact us with your requirements.

© 2017 Moorfield Nanotechnology Limited.