nanoEM

nanoEM

  • nanoEM

  • nanoEM chamber interior single magnetron sputtering source.

  • nanoEM

 

The nanoEM system is the first electron microscopy (EM) coating tool with a full research-grade feature set.

The units include stainless-steel chambers, turbomolecular pumping systems, water-cooled circular magnetrons for continuous operation and a precision sputtering power supply (DC; up to 300 W) as standard, all in a space-saving benchtop package. Ease-of-use and coating speed are built in for routine preparation of TEM/SEM samples.

Using high-end components and compatibility with conventional targets, the possibilities are endless.

Key features:

  • Electron microscopy and research-grade coating
  • Compact, benchtop unit
  • SEM stub/TEM grid/wafer supports
  • Up to 2 × 2” magnetron sputtering sources
  • Industry-standard sputtering targets
  • Turbomolecular pumping to <5 × 10-7 mbar
  • MFC-controlled process gas
  • Variable output DC power supply, up to 300 W
  • Fully automatic, recipe operation via touchscreen HMI
  • Automatic pressure control option
  • Equipped for easy servicing
  • Comprehensive safety features
  • Cleanroom compatible
  • Proven performance

Options:

  • Chamber viewports
  • Backing pump only
  • Dry pumping
  • Shutter
  • Plasma glow electrode
  • Stage rotation and tilt
  • Quartz crystal sensor head process monitoring
 
© 2017 Moorfield Nanotechnology Limited.