Minilab 080

MiniLab

080

  • MiniLab 080 system for e-beam evaporation with load-lock for fast sample entry/removal and low base pressures

  • MiniLab 080 system equipped for thermal and LTE evaporation for metals and organics

  • Rear of Minilab 080 system

  • Interior of Minilab 080 process chamber showing thermal evaporation and magnetron sputtering sources. Quartz crystal sensor heads are protected with foil for testing purposes

  • Interior of Minilab 080 process chamber with e-beam evaoration source with 6 × 7 cc pocket configuration

  • Interior of Minilab 080 process chamber with e-beam evaoration source with 6 × 7 cc pocket configuration

  • Operation of Minilab 080 e-beam evaporation system

  • E-beam evaporation controller fitted to Minilab 080 system

  • Minilab 080 process chamber with channels for water cooling/heating

  • Rear of Minilab 080 system showing turbmolecular pump fitted to chamber rear

  • Load-lock for fast sample entry/removal fitted to side of MiniLab 080 chamber

 

MiniLab 080 systems offer tall chambers ideally suited for thermal, LTE and e-beam evaporation techniques requiring longer working distances for optimum uniformity.

The MiniLab 080 standard configuration includes a turbomolecular pump positioned on an ISO160 port at the rear of the vacuum chamber. The vacuum chamber sits on a double-rack frame that contains all system control electronics and power supplies. MiniLab 080 systems are available with load-locks—please call for details. The tools are ideally suited to evaporation techniques where long working distances are required for best uniformity, and where evaporant incident angles close to 90° allow for optimal results for lift-off applications. However, as well as thermal, LTE and e-beam evaporation, the tools can also be fitted for magnetron sputtering (commonly as a multi-technique system). Substrate stages, usually at the top of the chamber, can accommodate substrate sizes up to 11” diameter. Substrate heating, rotation, bias and Z-shift are available, together with planetary stages and source and substrate shutters. Configurations range from a manually operated thermal evaporation system up to a multi-technique tool with fully-automated process control.

Key Features:

  • Modular design
  • Front-loading D-shaped vacuum chamber
  • Turbomolecular and cryo pumping systems
  • Base pressures <5 × 10-7 mbar
  • Metals, dielectrics and organics deposition
  • Up to 11” diameter substrates
  • Touchscreen HMI/PC for system control
  • Equipped for easy servicing
  • Comprehensive safety features and interlocks
  • Cleanroom compatible
  • Load-locks available

Techniques:

MiniLab 080 systems can be fitted with the following techniques:

  • Thermal evaporation
  • Low-temperature thermal evaporation (LTE)
  • E-beam evaporation
  • Magnetron sputtering

Options:

Available options include:

  • Pumping: Turbomolecular or cryogenic high-vacuum pumps, rotary or scroll backing pumps.
  • Gas/pressure: Manual or automatic control via MFCs and throttle valves.
  • Load-locks: Single- and multiple-sample.
  • Stages: Rotation, heating, cooling, Z-shift, bias and planetary.
  • Shutters: Source and substrate, pneumatic or motorised.
  • Operation: Manual or automatic via front panels, touchscreen HMI or PC.
  • Process: Quartz crystal sensor heads for rate/thickness monitoring or feedback-loop control.

Typical Configurations:

MiniLab 080 instruments are available in a variety of configurations. Typical setups include:

  • Thermal evaporation (metals): Four-source TE4 thermal evaporation component with source shutters and rotation stage. High power TEC-4A power supply and controller with recipe-based automated control. Quartz crystal sensor head with PC software for rate/thickness monitoring.
  • Thermal evaporation (metals and organics): Two TE1 thermal evaporation sources for metals and four LTE-1CC components for organics. Source shutters and rotation stage. Evaporation power supplies linked to quartz crystal sensor head and Inficon SQC-310 process controller for automated process control per user-defined rates/thicknesses.
  • E-beam evaporation: Multi-pocket (e.g., 6 × 7 cc or 8 × 4 cc) water-cooled e-beam source with 5 kW power supply/controller and automated pocket selection. Source and substrate shutters, and rotation. Quartz crystal sensor heads with Inficon SQC-310 process controller for automated process control per user-defined rates/thicknesses.



Magnetron sputtering sources can be added alongside the above techniques.

Call us today to discuss your requirements!

Service Requirements:

All MiniLab 080 tools require chilled water, dry compressed air, nitrogen for venting (optional) and electrical power (three-phase for e-beam evaporation).

Sputtering systems also require process gases (argon, oxygen and nitrogen).

Exact requirements will be provided with quotations or on request.

 
© 2017 Moorfield Nanotechnology Limited.