MiniLab Platforms

The MiniLab range from Moorfield: Flexible, modular systems for high-quality R&D and pilot-scale production thin-film deposition.

Minilab

MiniLab systems provide superior coating performance, with the flexibility and modularity of design to address a huge range of customer requirements.

The MiniLab range consists of several platforms. Each platform is generally associated with a specific vacuum chamber size. While all chambers are built to the same standards, and allow for high-vacuum operation, larger chambers allow for more techniques and flexibility than their smaller counterparts.

In addition to thin-film deposition, MiniLab systems can also be fitted with complementary techniques such as ion beam sources, etching components, and annealing stages.

Techniques:

  • Electron-beam (‘e-beam’) evaporation: Ultra-high temperature evaporation of metals and non-metals such as dielectrics
  • Low-temperature thermal evaporation (LTE): Controlled low temperatures for evaporation of volatile materials, typically organic compounds
  • Standard thermal evaporation: Evaporation of metals from resistively heated filaments and boats
  • High-temperature thermal evaporation: High-current resistive evaporation of metals and non-metals
  • Magnetron sputtering: Plasma sputtering of metal and non-metal targets

It is possible to fit multiple techniques on-board a single MiniLab system.

We also offer a variety of substrate stage options (heating; cooling; bias; etching; rotation; etc.), and can incorporate most third-party vacuum components.

Please contact us to discuss your specific requirements.

MiniLab 026 Platform

MiniLab 026 Platform

MiniLab 026 systems are ultra-compact floor standing vacuum evaporators for metal, dielectric and/or organic (OLED/PLED) thin-film deposition. The MiniLab 026 is also glovebox compatible and is the only system in the MiniLab range that can be easily retrofitted to an existing glovebox.

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MiniLab 060 Platform

MiniLab 060 Platform

MiniLab 060 systems are the smallest of our pilot-line units — but don’t be fooled by their compact footprint. They can pack 4 × 3" sputter sources and a 300 mm substrate into their chambers. Configurations range from a manually operated thermal system up to a multiple technique tool with fully-automated process control.

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MiniLab 080 Platform

MiniLab 080 Platform

For users requiring greater deposition ‘throw’ (distance from source to substrate), the MiniLab 080 series with D-shaped front-loading chamber offers an additional 150 mm giving a total working distance of up to 450 mm making this platform the ideal choice for e-beam and LTE deposition. As with the 060 units, load-lock options are available on this series.

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MiniLab 090 Platform

MiniLab 090 Platform

MiniLab 090 systems are configured for glovebox integration. These tools have slightly larger chambers than the 080 series, but with a similar aspect ratio that is ideal for point-source deposition techniques such as e-beam and thermal evaporation.

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MiniLab 125 Platform

MiniLab 125 Platform

The MiniLab 125 series is a true contender for small batch production in a professional environment. The D-shaped front-loading chamber is water-cooled/heated and allows for fast cycle times, whilst the “plug and play” MiniLab modular design gives rapid tool change availability. And all this at a very competitive price! Load-lock options are available on this series.

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