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The MiniLab range from Moorfield: Flexible, modular systems for high-quality R&D and pilot-scale production thin-film deposition.
MiniLab systems provide superior coating performance, with the flexibility and modularity of design to address a huge range of customer requirements.
The MiniLab range consists of several platforms. Each platform is generally associated with a specific vacuum chamber size. While all chambers are built to the same standards, and allow for high-vacuum operation, larger chambers allow for more techniques and flexibility than their smaller counterparts.
In addition to thin-film deposition, MiniLab systems can also be fitted with complementary techniques such as ion beam sources, etching components, and annealing stages.
- Electron-beam (‘e-beam’) evaporation: Ultra-high temperature evaporation of metals and non-metals such as dielectrics
- Low-temperature thermal evaporation (LTE): Controlled low temperatures for evaporation of volatile materials, typically organic compounds
- Standard thermal evaporation: Evaporation of metals from resistively heated filaments and boats
- High-temperature thermal evaporation: High-current resistive evaporation of metals and non-metals
- Magnetron sputtering: Plasma sputtering of metal and non-metal targets
It is possible to fit multiple techniques on-board a single MiniLab system.
We also offer a variety of substrate stage options (heating; cooling; bias; etching; rotation; etc.), and can incorporate most third-party vacuum components.
Please contact us to discuss your specific requirements.
MiniLab 026 Platform
MiniLab 026 systems are ultra-compact floor standing vacuum evaporators for metal, dielectric and/or organic (OLED/PLED) thin-film deposition. The MiniLab 026 is also glovebox compatible and is the only system in the MiniLab range that can be easily retrofitted to an existing glovebox.
MiniLab 060 Platform
MiniLab 060 systems are the smallest of our pilot-line units — but don’t be fooled by their compact footprint. They can pack 4 × 3" sputter sources and a 300 mm substrate into their chambers. Configurations range from a manually operated thermal system up to a multiple technique tool with fully-automated process control.
MiniLab 080 Platform
For users requiring greater deposition ‘throw’ (distance from source to substrate), the MiniLab 080 series with D-shaped front-loading chamber offers an additional 150 mm giving a total working distance of up to 450 mm making this platform the ideal choice for e-beam and LTE deposition. As with the 060 units, load-lock options are available on this series.
MiniLab 125 Platform
The MiniLab 125 series is a true contender for small batch production in a professional environment. The D-shaped front-loading chamber is water-cooled/heated and allows for fast cycle times, whilst the “plug and play” MiniLab modular design gives rapid tool change availability. And all this at a very competitive price! Load-lock options are available on this series.