Edwards E306

Refurbishments

  • Edwards E306

  • Edwards E306

 

Moorfield offer a refurbishment service for Edwards E306 units, including for conversion to other techniques.

There are many Edwards E306 systems around the world, and they are getting old!

Our team of experienced engineers are able to refurbish or recondition your Edwards E306 unit. Common tasks include:

  • Cleaning or repairing old components
  • Replacing obsolete components with modern equivalents
  • Modifying in-chamber techniques to fit new applications

For examples of configurations that we can work to, see the listings below.

For most jobs, work is carried out at our factory where we have the tools and facilities required. However, we are able to carry out simple tasks at your location.

We are able to work to most requirements — contact us and start a discussion today.

Edwards E306 Thermal

We can provide standard Edwards layouts available including 1, 2 or 3 boat configurations with interspaced shielding. 4 boat TE4 with optional co-deposition mode. Replacement thermal control systems either console or 19" rack-mount based.

Edwards E306 Sputtering

Standard Edwards layouts available including 1, 2 or 3 head configurations with interspaced shielding. RF, DC and pulsed DC supplies. Sample bias stages. Replacement quartz crystal control systems for PID loop deposition control.

Edwards E306 E-beam

Repair and refurbishment of standard Edwards EBE1 and EBE3 configurations available. New and upgraded power supplies. Heated/cooled sample stages. Replacement quartz crystal control systems for PID loop deposition control. Retrofitted 4 or 6 hearth e-beam sources with manual or auto indexation.

Edwards E306 Hybrid

Moorfield specialise in E306 multi-technique system configurations. Examples (of many possible configurations) include: E-beam with thermal evaporation, low-temperature with standard thermal evaporation, magnetron sputtering with thermal evaporation, sputtering with e-beam. The chamber is small, but it can be done!

Edwards E306 Control Options

Safety interlock upgrades, gauging upgrades, PLC control upgrades and deposition control upgrades using quartz crystal sensors.

 
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